2015 Fiscal Year Final Research Report
Role of radical generated by plasma in reaction mechanism of solid surface
Project/Area Number |
25871191
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Plasma science
Plasma electronics
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Research Institution | National Institute of Advanced Industrial Science and Technology |
Principal Investigator |
Teramoto Yoshiyuki 国立研究開発法人産業技術総合研究所, 環境管理研究部門, 研究員 (00635328)
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Project Period (FY) |
2013-04-01 – 2016-03-31
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Keywords | プラズマ / レーザー計測 / ラジカル / 誘電体 |
Outline of Final Research Achievements |
The validity of OH measurement in immediate vicinity of the dielectric surface was discussed using two geometries of laser-induced fluorescence (LIF) measurement, and surface distribution and temporal profiles of OH were examined. A comparison of parallel- and perpendicular-LIF techniques for OH measurement revealed that OH was mostly produced in a region several tens of lm above the dielectric surface. Ground-level atomic nitrogen was observed using using two-dimensional two-photon absorption laser-induced fluorescence (TALIF) techniques under atmospheric pressure. Radial distribution of atomic nitrogen density just after discharge pulse was measured at high resolution. Ground-level atomic oxygen during the streamer propagation was measured 2D-TALIF. The atomic oxygen was produced 20-140 ns after beginning of streamer propagation. It directly indicated that atomic oxygen was mainly generated in secondary streamer.
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Free Research Field |
非熱平衡プラズマ
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