sub-picojoule thermal sensor

2014 Fiscal Year Final Research Report

• Project/Area Number: 25886003
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Nano/Microsystems
• Research Institution: Tohoku University
• Principal Investigator: INOMATA Naoki 東北大学, マイクロシステム融合研究開発センター, 助教 (40712823)
• Project Period (FY): 2013-08-30 – 2015-03-31
• Keywords: MEMS / 熱センサ / 半導体

Outline of Final Research Achievements

For highly thermal sensitivity, downsizing of the sensor was required. pn junction, which is capable of downsizing by microfabrication techniques, was employed as a measurement principle due to its temperature dependence of electrical resistance. The fabrication process to enclose a pn junction based thermal sensor in a vacuum area in a microfluidic chip was established, and the characteristics of the fabricated device was evaluated. The thermal resolution of the device was 31.3 nJ. Further downsizing is possible by using electron beam lithography, and the thermal resolution could be improved more than 1000 times. In this research, the feasibility of the thermal device having pico-Joule thermal resolution was indicated.

Free Research Field

バイオナノ工学