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2016 Fiscal Year Annual Research Report

Practical application of uncertainty estimation method in three dimensional measurement for high precision of next generation three dimensional shape

Research Project

Project/Area Number 26249006
Research InstitutionThe University of Tokyo

Principal Investigator

高増 潔  東京大学, 大学院工学系研究科(工学部), 教授 (70154896)

Co-Investigator(Kenkyū-buntansha) 高橋 哲  東京大学, 先端科学技術研究センター, 教授 (30283724)
Project Period (FY) 2014-04-01 – 2019-03-31
Keywords座標計測 / 不確かさ推定 / 三次元形状測定 / 光計測 / ナノメートル計測
Outline of Annual Research Achievements

1.不確かさ推定理論の体系化とシミュレーションソフトウェアの提供の継続
昨年度までのシミュレーションソフトウェアの検証作業に基づいて,三次元計測における不確かさ推定理論の体系化を行った.標準を利用した測定機の校正作業により,測定機の運動学パラメータの不確かさが推定される.この理論体系を実際の三次元計測に適用し,シミュレーションソフトウェアを構築した.特定の測定機器(CMMおよびSEM)に対応した,不確かさシミュレーションソフトウェアの検証作業の結果をフィードバックして,ソフトウェアの更新を行った.このソフトウェアは,不確かさを推定するだけでなく,不確かさを小さくするための方法をソフトウェア上でテストできることを実証した.さらに,現実のシステムとして三次元測定機によるゲージの校正における不確かさ推定への適用を引き続き行った.これらのシステムの不確かさシミュレーション結果は,実際の不確かさとよく一致した.
2.光学的三次元形状測定の応用実験の継続
角度測定による三次元測定システムを適用対象として,より高精度な測定と,その不確かさの評価手法の実用化を目指した.回転するステージとオートコリメータを組み合わせることで,高精度化とステージの誤差の分離,オートコリメータの自律校正を可能にするシステムが構築できた.このシステムを三次元計測の実施例として開発し,理論的な不確かさ推定と合わせてシステム全体の不確かさ評価を理論的および実験的に行った.さらに,他の研究機関等が開発している角度測定による非球面形状測定機への適応を行い,不確かさ推定手法の評価を行った.また,角度測定機の系統誤差を自律校正する手法を開発し,基礎的な検討を行った.この手法により,不確かさの小さい形状測定の可能性を示せた.

Current Status of Research Progress
Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

まず,不確かさ推定理論の体系化とシミュレーションソフトウェアの提供に関しては,三次元計測における不確かさ推定理論の体系化を行い,標準を利用した測定機の校正作業により,測定機の運動学パラメータの不確かさが推定のためのソフトウェアの開発および適用を引き続き実現できた.特に,構築した体系に対応するシミュレーションソフトウェアを構築し,より広い対象(CMM,SEMおよびマルチセンサーシステム)に対応した不確かさシミュレーションソフトウェアを開発し,実際の適用を行った.さらに,他の手法との比較評価が行えた.
つぎに,光学的三次元形状測定の応用実験に関しては,角度測定による三次元測定システムを適用対象として,より高精度な測定と,その不確かさの評価手法の実用化の基本部分が実現でき,自律校正の手法の開発が行えた.この結果として,サブナノメートルの繰返しで大型非鏡面を計測できる可能性を示すことができた.

Strategy for Future Research Activity

2つの大きなテーマについて,以下の方針で研究を推進する.
まず,不確かさ推定理論の体系化とシミュレーションソフトウェアの提供では,実際の適用結果のフィードバックを引き続き行い,理論体系を実際の三次元計測に適用した結果を解析し,構築した体系に対応するシミュレーションソフトウェアを利用者が自由に使えるシステムを構築する.昨年度までに確立した不確かさシミュレーションソフトウェアの開発指針をもとに,不確かさを推定するだけでなく,不確かさを小さくするための方法をソフトウェア上でテストできるプラットホームの基礎部分の作成を推進する.システムを適用する対象を増やすと同時に,適用結果の分析を行い,システム性能の評価を行う.
次に,光学的三次元形状測定の応用実験では,昨年度までに開発した角度測定による三次元測定システムに対して,引き続きより高精度な測定と,提案した自律校正手法およびその不確かさの評価手法の実用化を進める.また,この測定結果の絶対精度評価を他の機関と協力して実施する.さらに,新しい光学的三次元形状測定手法の開発と,精度評価および校正方法の検討を行い,システム全体の不確かさ評価を理論的および実験的に行う.

  • Research Products

    (27 results)

All 2017 2016 Other

All Journal Article (4 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 4 results) Presentation (22 results) (of which Int'l Joint Research: 22 results,  Invited: 1 results) Remarks (1 results)

  • [Journal Article] Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens2016

    • Author(s)
      Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
    • Journal Title

      Precision Engineering

      Volume: 46 Pages: 254~262

    • DOI

      10.1016/j.precisioneng.2016.05.004

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Is the Two-Color Method Superior to Empirical Equations in Refractive Index Compensation?2016

    • Author(s)
      Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Journal Title

      Optics and Photonics Journal

      Volume: 2016 (6) Pages: 8~13

    • DOI

      10.4236/opj.2016.68B002

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology2016

    • Author(s)
      Chen Meiyun、Takahashi Satoru、Takamasu Kiyoshi
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: 17 Pages: 1093~1099

    • DOI

      10.1007/s12541-016-0133-6

    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Non-contact precision profile measurement to rough-surface objects with optical frequency combs2016

    • Author(s)
      Onoe Taro、Takahashi Satoru、Takamasu Kiyoshi、Matsumoto Hirokazu
    • Journal Title

      Measurement Science Technology

      Volume: 27 Pages: 124002~124002

    • DOI

      10.1088/0957-0233/27/12/124002

    • Peer Reviewed
  • [Presentation] 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology2017

    • Author(s)
      Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota
    • Organizer
      SPIE Advanced Lithography
    • Int'l Joint Research
  • [Presentation] Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer2017

    • Author(s)
      Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo
    • Organizer
      ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
    • Int'l Joint Research
  • [Presentation] High-Accuracy Absolute Length Measurement Using Optical-Comb Pulsed Interferometer and Its Application for Verification of Coordinate Measuring Machines2017

    • Author(s)
      Kiyoshi Takamasu
    • Organizer
      ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications
    • Int'l Joint Research / Invited
  • [Presentation] Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography2016

    • Author(s)
      Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      18th CIRP Conference on Electro Physical and Chemical Machining
    • Int'l Joint Research
  • [Presentation] Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb2016

    • Author(s)
      Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      euspen2016, 16th International Conference & Exhibition
    • Int'l Joint Research
  • [Presentation] Development of 3D form measurement of semiconductor structure - Measurement of FinFET profile using TEM and CD-SEM images2016

    • Author(s)
      Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      euspen2016, 16th International Conference & Exhibition
    • Int'l Joint Research
  • [Presentation] High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects2016

    • Author(s)
      Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      CLEO2016, Conference on Lasers and Electro-Optics
    • Int'l Joint Research
  • [Presentation] Development of non-destructive optical depth measurement of sub-diffraction limit fine holes2016

    • Author(s)
      Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      nanoMan2016, 5th International Conference on Nanomanufacturing
    • Int'l Joint Research
  • [Presentation] Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance2016

    • Author(s)
      Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      LANE2016, 9th International Conference on Photonic Technologies
    • Int'l Joint Research
  • [Presentation] Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position2016

    • Author(s)
      Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPE2016, 31st ASPE Annual Meeting
    • Int'l Joint Research
  • [Presentation] Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface2016

    • Author(s)
      Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ASPE2016, 31st ASPE Annual Meeting
    • Int'l Joint Research
  • [Presentation] A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography2016

    • Author(s)
      Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Int'l Joint Research
  • [Presentation] Improved back-focal-plane interferometry for monitoring nanoparticle position2016

    • Author(s)
      Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Int'l Joint Research
  • [Presentation] Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system2016

    • Author(s)
      Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Int'l Joint Research
  • [Presentation] Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode2016

    • Author(s)
      Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ISOT2016, International Symposium on Optomechatronics Technologies
    • Int'l Joint Research
  • [Presentation] Precise alignment monitor by using optical frequency comb for the muon g-2/EDM experiment at J-PARC2016

    • Author(s)
      Tatsuya Kume, Tsutomu Mibe, Shoichiro Nishimura, Mikio Sakurai, Yutaro Satoh, Wiroj Sudatham, Kiyoshi Takamasu, Hiromasa Yasuda
    • Organizer
      IWAA2016, International Workshop on Accelerator Alignment
    • Int'l Joint Research
  • [Presentation] Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-2016

    • Author(s)
      Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Int'l Joint Research
  • [Presentation] Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light2016

    • Author(s)
      Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Int'l Joint Research
  • [Presentation] In-process measurement for micro-stereolithography using surface plasmon resonance2016

    • Author(s)
      Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Int'l Joint Research
  • [Presentation] Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-2016

    • Author(s)
      Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Int'l Joint Research
  • [Presentation] Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs2016

    • Author(s)
      Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Int'l Joint Research
  • [Presentation] Development of Advanced Measurement Method of 3D Semiconductor Structure - 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -2016

    • Author(s)
      Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi
    • Organizer
      ICPE2016, 16th International Conference on Precision Engineering
    • Int'l Joint Research
  • [Remarks] 東京大学 高増・高橋研究室

    • URL

      www.nanolab.t.u-tokyo.ac.jp

URL: 

Published: 2018-12-17  

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