2017 Fiscal Year Final Research Report
Development of nano manufacturing technology by combination of nano machining and self organization technique, and application to development of optical function.
| Project/Area Number |
26249007
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
松村 隆 東京電機大学, 工学部, 教授 (20199855)
長尾 忠昭 国立研究開発法人物質・材料研究機構, その他部局等, その他研究員 (40267456)
山中 晃徳 東京農工大学, 工学(系)研究科(研究院), 准教授 (50542198)
梅原 徳次 名古屋大学, 工学研究科, 教授 (70203586)
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| Co-Investigator(Renkei-kenkyūsha) |
YAMAMOTO TAKATOKI 東京工業大学, 工学院, 准教授 (20322688)
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| Project Period (FY) |
2014-04-01 – 2018-03-31
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| Keywords | 超微細塑性加工 / 自己組織化 / 微細金属素子 / 光学機能材料 / 製造プロセス / 微細切削加工 / 熱ナノインプリント |
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| Outline of Final Research Achievements |
This research was aimed to develop low cost and efficient manufacturing technology for metallic elements of submicrometer size on quartz glass substrates. Firstly, a combined machining device capable of nano/micro cutting and nano plastic forming was developed. Nano structured diamond tools used on the combined machining device were also develope, and those machining characteristics were investigated. Then, it was shown that metallic elements that induce unique optical properties, such as metal nanodot arrays and double nanorod arrays, can be fabricated by combination of nano/micro machining and self-organization process. In addition, thermal nanoimprinting method to transfer a nano/micro structures fabircated on a mother mold to a plastic film was developed. Chemical stamping method using the plastic mold was also proposed. It was show that the chemical stamping method is capable for efficient production of metallic elements of nano/micro meter size.
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| Free Research Field |
加工学
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