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2017 Fiscal Year Final Research Report

Development of achromatic full-field X-ray microscope and its applications

Research Project

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Project/Area Number 26286077
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Quantum beam science
Research InstitutionOsaka University

Principal Investigator

Matsuyama Satoshi  大阪大学, 工学研究科, 助教 (10423196)

Research Collaborator YAMADA Jumpei  
YASUDA Shuhei  
Project Period (FY) 2014-04-01 – 2017-03-31
KeywordsX線顕微鏡 / X線ミラー / 結像ミラー / 顕微分光 / 蛍光X線 / XAFS / 超精密加工
Outline of Final Research Achievements

Full-field hard X-ray microscopes are very promising due to capabilities of high-resolution, spectroscopic and quick observations. However, there are no microscopes without chromatic, wavefront and comatic aberrations, so that their applications are limited. In this research, developed four total-reflection mirrors, i.e., Advanced Kirkpatrick-Baez mirror optics, overcame the problem. Experiments at SPring-8 to evaluate the performances revealed that it achieved 50-nm spatial resolution without chromatic aberration. This is the first microscope that has 50-nm resolution without chromatic aberration. Furthermore, a full-field XAFS imaging system and full-field X-ray fluorescence microscope were developed. They could visualize distributions of chemical states and elements of a specimen as well as fine structure.

Free Research Field

X線光学

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Published: 2019-03-29  

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