Lead-free piezoelectric thick films deposited by ultrasonic assisted hydrothermal method for miniaturized actuator

2016 Fiscal Year Final Research Report

• Project/Area Number: 26289059
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: The University of Tokyo
• Principal Investigator: MORITA Takeshi 東京大学, 新領域創成科学研究科, 准教授 (60344735)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: 水熱合成法 / 超音波アシスト / 圧電デバイス / 圧電厚膜 / 非鉛圧電材料

Outline of Final Research Achievements

A thick piezoelectric film is strongly required for realizing miniaturized piezoelectric actuator because conventional piezoelectric ceramics has difficulty to be machined. The hydrothermal synthesis method enables such thick film and high power ultrasonic irradiation during hydrothermal process is effective for thicker film. In this study, we examined to obtain thick piezoelectric film for the miniaturized actuator by using the ultrasonic assisted hydrothermal synthesis. As a result, the thickness of lead zirconate titanate was increased to 31 micro meter by repeated two processes, and the excellent vibration performance 1.2 m/s was measured by using the piezoelectric transducer. In addition, 10 micro meter thick film of barium titanate could be achieved as a lead-free material. Its piezoelectric property was confirmed by a piezoelectric force microscope (PFM).

Free Research Field

圧電デバイス