Mechanism of energy loss in 1 GHz MEMS metal resonators due to nano-crystal

2016 Fiscal Year Final Research Report

• Project/Area Number: 26390041
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Nano/Microsystems
• Research Institution: Ritsumeikan University
• Principal Investigator: Tanigawa Hiroshi 立命館大学, 総合科学技術研究機構, 教授 (00469199)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: 共振器 / エネルギ損失 / Q値 / 静電気力 / 高周波 / ナノ結晶 / 金属 / シリコン

Outline of Final Research Achievements

We fabricated a nickel MEMS resonatorin order to evaluate mechanical energy loss mechanism of nano-crytal. However, fabricated devices failed in fully operating due to shortage. Along with this research, we developed a new resonator based on pn-diode resonators, which had no need of a space gap. From the evaluation of a fabricated 20 MHz ring resonator, we succeeded in demonstrating in-plane drive of pn-diode resonators. The pn-diode resonators consist of only silicon and can be easily integrated with IC's. At present, the evaluation of energy loss in the pn-diode resonators is investigated.

Free Research Field

MEMS共振器