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2016 Fiscal Year Final Research Report

Development of Ge nanoparticle film by using inflight plasma process for Li ion butteries

Research Project

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Project/Area Number 26390097
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Plasma electronics
Research InstitutionOsaka University

Principal Investigator

Uchida Giichiro  大阪大学, 接合科学研究所, 准教授 (90422435)

Project Period (FY) 2014-04-01 – 2017-03-31
Keywordsゲルマニウム / プラズマプロセス / ナノ粒子 / Liイオン電池
Outline of Final Research Achievements

We have developed a new plasma process for the fabrication of the Ge nanoparticle films, and applied the films to Li ion batteries. In the experiments, we have deposited crystalline Ge nanoparticle films using a radio frequency magnetron sputtering method in argon and hydrogen gas mixture under a high pressure condition. In the process, Ge nanoparticles were generated in the reactive plasma, and were transported to the downstream substrate by neutral gas flow. The Ge nanoparticles transited from amorphous to crystalline structure by adding H2 gas in the Ar discharge gas. We evaluated performance of Li ion batteries with crystalline Ge nanoparticle film as anode material. The first cycle of charge/discharge property showed that the capacity was around 1600 mAh/g. The discharge capacity remained at about 600 mAh/g after 50th cycle.

Free Research Field

プラズマ理工学

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Published: 2018-03-22  

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