2017 Fiscal Year Final Research Report
Study of a solid Ar plasma source generating continuously soft X-ray pulses in water window around 3nm
| Project/Area Number |
26390113
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Quantum beam science
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| Research Institution | University of Hyogo |
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Principal Investigator |
Amano Sho 兵庫県立大学, 高度産業科学技術研究所, 助教 (50271200)
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| Co-Investigator(Kenkyū-buntansha) |
宮本 修治 兵庫県立大学, 高度産業科学技術研究所, 教授 (90135757)
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| Project Period (FY) |
2014-04-01 – 2018-03-31
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| Keywords | レーザープラズマ / 軟X線 / 水の窓 / 固体アルゴン / 高平均出力 / 微細加工 |
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| Outline of Final Research Achievements |
Water window soft X-ray around 3 nm are expected in soft X-ray microscope imaging of live biological samples or micromachining for organic polymer samples. We developed a laser plasma source that had a solid Ar target and generated the soft X-ray. It is both compact and inexpensive compared to conventional synchrotron radiation sources. A high average power of 0.5 W was achieved in the water window soft X-ray irradiated by a commercial Nd:YAG Q-switched laser. Micromachining in micron size scale for PMMA samples was succeeded and we demonstrated the laser plasma source was practical and useful.
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| Free Research Field |
レーザー理工学
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