2016 Fiscal Year Final Research Report
Measurements of excitation and fragmentation cross sections of plasma processing gases by electron impact
| Project/Area Number |
26400536
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Toho University |
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Principal Investigator |
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| Research Collaborator |
TAKAHASHI Karin
SAKAUE Hiroyuki
HASEGAWA Toru
KATO Daiji
MURAKAMI Izumi
MIYAUCHI Naoya
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Keywords | プラズマプロセス / イオン化解離 / 同位体効果 / 二電子励起状態 / 微分断面積 / 一般化振動子強度 |
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| Outline of Final Research Achievements |
In this work, the "mixed gas method" was established first to determine the absolute cross sections for excitation and fragment formation of plasma processing gases. As the second steps, we carried out the scattered electron-ion coincidence experiment to discuss the doubly excited states and their decay processes for molecular nitrogen and deuterium, respectively. We determined the double differential cross sections and generalized oscillator strengths of molecular deuterium, and specified that the dissociative ionization was more difficult to occur than hydrogen by isotope effect. In addition, we obtained electron energy-loss spectra of tetrafluoromethane. The part of results were published in “Eur. Phys. Journal D”, and were reported in several international conferences and domestic academic meetings.
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| Free Research Field |
原子分子物理学
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