2016 Fiscal Year Final Research Report
High efficient super-planarization of hard materials for a wafer by the advanced superfinishing with the mechanochemical super abrasive stones
| Project/Area Number |
26420065
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Kansai University |
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Principal Investigator |
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Keywords | 超平滑化加工 / 超仕上げ / ダイヤモンド超砥粒砥石 / サファイア / 光学ガラス / メカノケミカル / 複合砥粒砥石 |
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| Outline of Final Research Achievements |
The superfinishing with the new vitrified bonded mechanochemical/ mechanochemical hard abrasive stones has been applied to the super-planarization of hard materials for a wafer like glass, sapphire and so on,
In the super-planarization of glass, the machining time of the superfinishing has been one-fifth of that of conventional polishing. On the other hand, in that of sapphire as super hard material, the machining time of the multistage superfinishing has been one-forth of that of conventional lapping. Moreover, this superfinishing has achieved the surface roughness of 2.0 nmRa.
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| Free Research Field |
超精密加工
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