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2016 Fiscal Year Final Research Report

The measurements of Czochralski melt flow under the rotational magnetic field and the electromagnetic field for the high quality crystal growth.

Research Project

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Project/Area Number 26420151
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Thermal engineering
Research InstitutionOita University

Principal Investigator

Iwamoto Mitsuo  大分大学, 工学部, 准教授 (80232718)

Project Period (FY) 2014-04-01 – 2017-03-31
Keywords対流伝熱 / チョクラルスキー法 / 液体金属 / 回転磁場 / 電流-磁場印加 / 超音波ドップラー法 / 数値シミュレーション
Outline of Final Research Achievements

Experimental and numerical studies were carried out for Czochralski melt convection under the rotational magnetic field and the electromagnetic field. A silicon single crystal for the semiconductor is mainly manufactured by Czochralski method. The quality of grown crystal is determined by the melt flow, so that the static magnetic field applied the melt to control the melt convection, nowadays. The model experiment using Gallium melt was carried out under the rotational magnetic field and the electromagnetic field. In addition, the numerical computation was carried out to visualize the melt convection under the rotational magnetic field. The rotational magnetic field and the electromagnetic field had an advantage to control the melt convection than the traditional static magnetic field in spite of the weak magnetic field.

Free Research Field

熱工学

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Published: 2018-03-22  

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