Development and application of fast and large-area MEMS optical calorimeter at picowatt resolution in air at room temperature

2016 Fiscal Year Final Research Report

• Project/Area Number: 26420407
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Amemiya Kuniaki 国立研究開発法人産業技術総合研究所, 物理計測標準研究部門, 主任研究員 (60361531)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: 計測機器 / 光カロリメータ / MEMS / バイメタル / 大面積

Outline of Final Research Achievements

We have developed a novel bimetal MEMS calorimeter as a high-sensitivity photothermal detector having large size of 5 mm × 5 mm for high-throughput optical radiometry. Prototypes of the Si/Al bimetal MEMS sensors were fabricated via SOI processes. Their thermo-mechanical displacements can be measured with a fiber Fabry-Perot interferometer. Noise equivalent power (NEP) of the sensor system was estimated to be 12 nW in air at room temperature, being comparable to the conventional thermoelectric devices. Further reduction of the NEP toward sub-nW, in principle, would be possible owing to their Johnson-noise-free merit.

Free Research Field

工学