Direct patterning of ceramics thun films from the precursor solutions by electro-chemical deposition method under the pulsed electric feild

2016 Fiscal Year Final Research Report

• Project/Area Number: 26420736
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Material processing/Microstructural control engineering
• Research Institution: University of Toyama
• Principal Investigator: SAIKI Atsushi 富山大学, 大学院理工学研究部(工学), 教授 (50221255)
• Research Collaborator: HSSHIZUME Takashi
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: イットリア安定化ジルコニア / セリア / 酸化チタン / 電気化学堆積法 / パルス電場印可 / 水溶液 / 析出形態 / パターニング

Outline of Final Research Achievements

Thin films of YSZ and Ceria were used as buffer layer in electro devices because of their chemical stability and insulation property. In this study, by applying the pulsed electric fields during the electrochemical deposition, the morphology control method was investigated. The thin films were deposited from the precursor solution on the glass substrate by applying the electric field. In addition, another pulsed electric field was applied to the perdicular direction to the film deposition direction. In the limited condition, the pinstripe patterns of ceramic films according to the frequency of the applied pulsed electrical field were observed. Ions movements were restricted by the standing waves due to the applied pulsed electric field and therefore deposition area were limited. The cyclical correlation between the applied pulsed electrical field and the distances of pinstripes was also observed. These methods were thought to be applied to new patterning techniques.

Free Research Field

無機材料科学、薄膜製造