Thermal Actuation of MEMS Structure by Plasmonic Local Heating

2016 Fiscal Year Final Research Report

• Project/Area Number: 26600058
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems
• Research Institution: The University of Electro-Communications (2016); The University of Tokyo (2014-2015)
• Principal Investigator: Kan Tetsuo 電気通信大学, 大学院情報理工学研究科, 准教授 (30504815)
• Research Collaborator: ISOZAKI Akihiro
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: 表面プラズモン / MEMS / 局所加熱 / 偏光

Outline of Final Research Achievements

We proposed thermal actuation method of MEMS structures by local heating using a metal nano particle in order to develop a mechanical actuation well below the diffraction limit of light. Since an an-isotropic nano particle exhibits a polarization dependent light scattering characteristics, directional orientation nano particles can be arranged such that only one particular nano particle responds to one particular polarization state of the radiating light. Such arrangement can offer a polarization dependent local heating by a choice of a polarization state of the irradiation light, which can produce a selective micro structure actuation. In this study, we analyzed a scattering and heating characteristics of nano particle, and investigated a beam design of tri-axial actuation of MEMS structures.

Free Research Field

MEMS