2016 Fiscal Year Final Research Report
Multifunctional Discharging Jet Array Device Realized by Integration of Micromachined Fluidic Channels and Electrodes
| Project/Area Number |
26600064
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nano/Microsystems
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| Research Institution | Kagawa University |
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Principal Investigator |
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Keywords | 微小ジェット / マイクロデバイス / 放電プラズマ |
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| Outline of Final Research Achievements |
In this study, a multifunctional discharging jet array device and its related technologies have been realized by integration of micromachined fluidic channels and electrodes. The basic technologies and bases of concept have been established in this project successfully. In addition, control technique of the individual discharging jet is newly developed since the jet array can control its overall shape and relative position, and gas components flexibly. In the research period, various test devices have been fabricated to validate the effectiveness of the new device. Packaging of jet array device was explored and finally established to evaluate the essential performances.
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| Free Research Field |
マイクロデバイス工学
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