2016 Fiscal Year Final Research Report
Significant improvement in performance of liquid-environment atomic force microscopy by silicon nitride membrane
| Project/Area Number |
26600095
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Kanazawa University |
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Principal Investigator |
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Keywords | 原子間力顕微鏡 |
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| Outline of Final Research Achievements |
We have developed atomic force microscope (AFM) with a shielding mechanism and improved its stability and force resolution. We fabricated a small hole in a silicon nitride membrane that was originally designed for electron microscopy by focused ion beam. By inserting a probe into liquid through this hole, we enabled to immerse only the tip apex into liquid. To avoid the contact between the cantilever and the membrane, we used a thin quartz probe glued on the cantilever and fabricated an electron beam deposited tip on the probe apex. With these efforts, we enabled atomic-resolution imaging in liquid by immersing only the tip apex into liquid and improved the force resolution by ~3 times. The developed mechanism is useful for improving the stability in the measurements of gas-generating samples and the quantitative capability of the potential measurements.
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| Free Research Field |
ナノ計測工学
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