Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distribution

2014 Fiscal Year Final Research Report

• Project/Area Number: 26630018
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: TAKAHASHI Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
• Co-Investigator(Kenkyū-buntansha): TAKAMASU Kiyoshi 東京大学, 大学院工学系研究科, 教授 (70154896)
• Project Period (FY): 2014-04-01 – 2015-03-31
• Keywords: 欠陥計測 / ナノ欠陥 / 光計測 / 超解像計測

Outline of Final Research Achievements

We proposed the novel high resolution optical measurement, which can be applied to the inspection for nano-scale functional structures such as semiconductor patterns, micro mechanical functional devices. With the proposed method, super optical resolution beyond the diffraction limit can be expected by analyzing the multiple far-field optical images detected by scanning the Gaussian beam spot with a nano-scale shift. Both theoretical and experimental analyses verified the validity of the fundamental core concept that the proposed method can perform a super resolution inspection for fine structures beyond the diffraction limit.

Free Research Field

生産工学・加工学