Novel Nanofabrication Techniques Based on Highly Localized Catalytic Chemical Reaction

2015 Fiscal Year Final Research Report

• Project/Area Number: 26630025
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: Toyohashi University of Technology
• Principal Investigator: SHIBATA TAKAYUKI 豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (10235575)
• Project Period (FY): 2014-04-01 – 2016-03-31
• Keywords: ナノ加工 / 原子間力顕微鏡（AFM） / AFM加工 / ナノファブリケーション / 触媒援用加工 / 白金触媒AFMプローブ / 酸化チタン光触媒AFMプローブ

Outline of Final Research Achievements

I proposed novel nanofabrication techniques based on highly localized chemical reaction using a catalytically active atomic force microscope (AFM) probe. By employing a Pt-coated AFM probe as a tool for nanomachining, nanoscale grooves can be fabricated on a Si surface at room temperature via Pt-assisted catalytic chemical etching in just water without adding any chemicals to be used as an etchant for Si. Moreover, the photocatalytic decomposition (patterning) of DNA molecules can be performed under UV irradiation based on localized photochemical oxidation using a TiO2-coated AFM probe. I also demonstrated that this technique can be applied to penetrate a cell membrane for intracellular delivery.

Free Research Field

MEMS，マイクロ・ナノマシニング