Friction force microscope with a highly accurate gap control by integrating a driving mechanism to probe

2015 Fiscal Year Final Research Report

• Project/Area Number: 26630039
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Nagoya University
• Principal Investigator: Fukuzawa Kenji 名古屋大学, 工学(系)研究科(研究院), 教授 (60324448)
• Project Period (FY): 2014-04-01 – 2016-03-31
• Keywords: 摩擦力顕微鏡 / トライボロジー / 走査型プローブ顕微鏡 / ナノトライボロジー / マイクロマシン

Outline of Final Research Achievements

With the development of micro fabrication technology, lubrication technology between mechanical elements with a small sliding gap is required. Aiming at establishing a method for measuring the frictional force and load with a precise definition of the gap, which is essential to elucidate the lubrication phenomena at small gaps, we tried to establish friction force microscopy (FFM) at a constant gap rather than usual FFM at a constant load. Based on the novel idea of integrating a driving mechanism to the probe, we proposed FFM with a highly accurate gap control and successfully demonstrated its feasibility.

Free Research Field

マイクロナノ計測工学