Speeding up of electric/magnetic force microscopy by detecting the coupled vibration mode of quartz-resonator sensor

2016 Fiscal Year Final Research Report

• Project/Area Number: 26630185
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Measurement engineering
• Research Institution: Osaka University
• Principal Investigator: Miyato Yuji 大阪大学, 基礎工学研究科, 助教 (80512780)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: 原子間力顕微鏡 / 走査プローブ顕微鏡 / 水晶振動子

Outline of Final Research Achievements

High-speed atomic force microscopy (HS-AFM) is the powerful tool to reveal dynamic phenomena on the nanoscale. In this study, the high speed imaging of nano-physical properties was attempted by applying a quartz-resonator sensor to HS-AFM. Two cantilever-tips were glued on each prong in the sensor for the counter balance. As the result, the Q-factor of the sensor was kept high after the tip attachment. The basic microscope system was developed suitably for using the tip-attached sensor. The limit of the imaging speed was a few second per one frame for 1 square microns. It was assumed that the sensor should respond a sinusoidal force by modulation of the electric or magnetic interaction, causing the coupled vibration mode. The vibration was analyzed with the simulations, and it was tried to verify the coupled vibration mode. Toward the high speed imaging of nano-properties, the functional extension was achieved in terms of applying the quartz-resonator sensor, bi-modal method and so on.

Free Research Field

計測工学