High-speed roller nanoreplication using laser surface heating

2015 Fiscal Year Final Research Report

• Project/Area Number: 26709004
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Partial Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: NAGATO Keisuke 東京大学, 工学(系)研究科(研究院), 准教授 (50546231)
• Project Period (FY): 2014-04-01 – 2016-03-31
• Keywords: 超精密金型転写 / 高速組立成型 / マイクロ・ナノデバイス / トライボロジ― / ナノ材料

Outline of Final Research Achievements

This project developed a method of replication of nanostructures by direct heating surface of roller mold. We designed and assembled a roller replication system, in which 100-mm-wide mold is setup and 100W laser is focused and irradiated on the surfaces of the optical polymer film. The system successfully replicated submicron - 10 micron patterns. The phenomena of laser heating and cooling of the polymer surface by finite element method. It is clarified that high power density and short irradiation time resulted in high replication speed. Furthermore, an antireflection structure and light extraction structures were replicated and their optical properties were investigated.

Free Research Field

ナノ成形加工学、ナノ材料加工学