Clarification of multiple bubble dynamics in megasonic field and the application to damage-less cleaning

2016 Fiscal Year Final Research Report

• Project/Area Number: 26820038
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Fluid engineering
• Research Institution: Tohoku University
• Principal Investigator: OCHIAI Naoya 東北大学, 流体科学研究所, 助教 (40614508)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: メガソニック / キャビテーション / 気泡間相互作用 / 誘起圧力波 / 数値解析 / Bjerknes力

Outline of Final Research Achievements

The nonspherical multiple-bubble behavior in a megasonic field is analyzed using computational fluid dynamics to establish megasonic cleanig which is a physical cleaning method for semiconductor device. In the study of translational motion of multiple-bubble, two bubbles behavior are clasified according to the equilibrium radius and the useful characteristics for the megasonic cleaning without pattern damage. In the study of the oscillating behavior, when the number of bubbles increases, bubbles with a smaller equilibrium radius can induce high impulsive pressure. The result indicates that bubbles with a smaller equilibrium radius predicted by single bubble analysis contribute to the cleaning and pattern damage in the typical megasonic field including many bubbles.

Free Research Field

流体工学