ソース端ドナー原子のエネルギーフィルタ効果を用いたSiナノトランジスタ

2015 Fiscal Year Annual Research Report

• Project/Area Number: 26820127
• Research Institution: Shizuoka University
• Principal Investigator: Moraru Daniel 静岡大学, 工学部, 准教授 (60549715)
• Project Period (FY): 2014-04-01 – 2016-03-31
• Keywords: 電子デバイス・機器 / シングルドーパント / シリコン / 量子ドット / ドーパント原子 / ナノデバイス / トランジスタ

Outline of Annual Research Achievements

本研究の目的は、微細SOI-MOSFETにおいて、ソース端リンドナーのエネルギーフィルタリング効果を低温および室温で確認して立ち上がり特性の急峻化を目指すことである。平成27年度に得られた主な結果は以下のとおりである。
1)n+／i／n+構造の微細SOI-MOSFETを作製・評価した。チャネル幅Wが十分に小さければ、単電子トンネル電流がソース端付近のリンドナー量子ドットによって決まるとともに、比較的高温（～100 K）まで観察できることを示した(SNW WS 2015)。この結果は、本研究の目的で用いた仮説である「ソース端リンドナーのエネルギーフィルターの効果」が原理的に正しいことを示している。
しかし、この効果を室温で安定的に利用するためには、量子ドットの位置やエネルギー深さを正確に制御するとともに最適化することが重要と思われる。
2) リンドナー量子ドットの位置を制御するために選択ドーピング技術を用いてチャネル中央付近に量子ドットを形成し、電流電圧特性と量子ドットの電子状態の関係を明らかにした (NRL 2015)。また、ごく最近、このデバイスでWが十分に狭い場合は、中央付近の量子ドットを介した単電子トンネリングが室温でも観測されることを見出した（SNW WS2016にて発表予定）。これにより動作の温度の高温化をほぼ達成することができた。ただし、このFETは、量子ドットがソース端から離れているので、「FETの立ち上がり特性の急峻化」に結び付くか否かは明らかでなく、今後、量子ドットのチャネル内での位置の効果を詳しく調べることが重要となる。
3) 現在、選択ドーピングのチャネル内位置を変えてFETを作製・評価している。予備的なI-V測定を進めている段階であるが、今後、エネルギーフィルタリングのためのリンドナー量子ドットの最適位置と室温動作を両立させるべく研究を進めていく。

Research Products

• [Int'l Joint Research] Warsaw Institute of Technology(Poland)
  • Country Name: Poland
  • Counterpart Institution: Warsaw Institute of Technology
• [Int'l Joint Research] University of Indonesia/Agency for Assess. and Applic. Technol.(Indonesia)
  • Country Name: Indonesia
  • Counterpart Institution: University of Indonesia/Agency for Assess. and Applic. Technol.
• [Int'l Joint Research] University of Southampton(United Kingdom)
  • Country Name: United Kingdom
  • Counterpart Institution: University of Southampton
• [Journal Article] Atomistic nature in band-to-band tunneling in two-dimensional silicon pn tunnel diodes (2016)
  • Author(s): Michiharu Tabe, Hoang Nhat Tan, Takeshi Mizuno, Manoharan Muruganathan, Le The Anh, Hiroshi Mizuta, Ratno Nuryadi, Daniel Moraru
  • Journal Title: Applied Physics Letters Volume: 108 Pages: 093502-1-5
  • DOI: http://dx.doi.org/10.1063/1.4943094
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Electric-field-assisted formation of an interfacial double-donor molecule in silicon nano-transistors (2015)
  • Author(s): Arup Samanta,Daniel Moraru, Takeshi Mizuno, Michiharu Tabe
  • Journal Title: Scientific Reports Volume: 5 Pages: 17377-1～10
  • DOI: 10.1038/srep17377
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Effect of individual dopants in nano-SOI-MOSFETs and nano-pn-diodes (2015)
  • Author(s): M. Tabe, D. Moraru, A. Samanta, K. Tyszka, H. N. Tan, Y. Takasu, R. Jablonski, L. T. Anh, H. Mizuta, T. Mizuno
  • Journal Title: ECS Transactions Volume: 69 Pages: 189-195
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Physics of strongly-coupled dopant-atoms in nanodevices (2015)
  • Author(s): Daniel Moraru, Krzysztof Tyszka, Yuki Takasu, Arup Samanta, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
  • Journal Title: International Journal of Technology Volume: 6 Pages: 1057-1064
  • DOI: http://dx.doi.org/10.14716/ijtech.v6i6.1305
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Tunneling in systems of coupled dopant-atoms in silicon nanodevices (2015)
  • Author(s): Daniel Moraru,Arup Samanta, Krzysztof Tyszka, Le The Anh, Manoharan Muruganathan, Takeshi Mizuno, Ryszard Jablonski, Hiroshi Mizuta, Michiharu Tabe
  • Journal Title: Nanoscale Research Letters Volume: 10 Pages: 372-1-10
  • DOI: 10.1186/s11671-015-1076-z
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Effect of selective doping on the spatial dispersion of donor-induced quantum dots in Si nanoscale transistors (2015)
  • Author(s): Krzysztof Tyszka, Daniel Moraru, Arup Samanta, Takashi Mizuno, Ryszard Jablonski, Michiharu Tabe
  • Journal Title: Applied Physics Express Volume: 8 Pages: 094202-1～4
  • DOI: http://dx.doi.org/10.7567/APEX.8.094202
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Comparative study of donor-induced quantum dots in Si nano-channels by single-electron transport characterization and Kelvin probe force microscopy (2015)
  • Author(s): Krzysztof Tyszka, Daniel Moraru, Arup Samanta, Takashi Mizuno, Ryszard Jablonski, Michiharu Tabe
  • Journal Title: Journal of Applied Physics Volume: 117 Pages: 244307-1-6
  • DOI: http://dx.doi.org/10.1063/1.4923229
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Tunneling transport in quantum dots formed by coupled dopant atoms (2015)
  • Author(s): Daniel Moraru, Arup Samanta, Takahiro Tsutaya, Yuki Takasu, Takeshi Mizuno, Michiharu Tabe
  • Journal Title: Advanced Materials Research Volume: 1117 Pages: 78-81
  • DOI: 10.4028/www.scientific.net/AMR.1117.78
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Kelvin probe force microscope observation of donors' arrangement in Si transistor channel (2015)
  • Author(s): Krzysztof Tyszka, Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
  • Journal Title: Advanced Materials Research Volume: 1117 Pages: 82-85
  • DOI: 10.4028/www.scientific.net/AMR.1117.82
  • Peer Reviewed / Int'l Joint Research
• [Presentation] Enhancement of inter-band tunneling due to low-dimensionality of lateral 2D silicon Esaki diodes (2016)
  • Author(s): D. Moraru, H. N. Tan, L. T. Anh, M. Manoharan, T. Mizuno, R. Nuryadi, H. Mizuta, and M. Tabe
  • Organizer: 2016 IEEE Silicon Nanoelectronics Workshop
  • Place of Presentation: Hilton Hawaiian Village, HI USA
  • Year and Date: 2016-06-12 – 2016-06-13
  • Int'l Joint Research
• [Presentation] Single-electron tunneling operation via a-few-donor quantum dots in SOI-FETs up to room temperature (2016)
  • Author(s): A. Samanta, Y. Takasu, T. Mizuno, D. Moraru, and M. Tabe
  • Organizer: 2016 IEEE Silicon Nanoelectronics Workshop
  • Place of Presentation: Hilton Hawaiian Village, HI USA
  • Year and Date: 2016-06-12 – 2016-06-13
  • Int'l Joint Research
• [Presentation] Tunneling-transport operation of selectively-doped dopant-atom transistors up to room temperature (2016)
  • Author(s): A. Samanta, D. Moraru*, Y. Takasu, T. Mizuno, and M. Tabe
  • Organizer: 63rd JSAP Spring Meeting
  • Place of Presentation: 東京工業大学（東京都目黒区）
  • Year and Date: 2016-03-19 – 2016-03-22
• [Presentation] Effects of phonons and discrete dopants on band-to-band tunneling in two-dimensional Si pn junction diodes (2016)
  • Author(s): D. Moraru, H. N. Tan, R. Unno, T. Mizuno, M. Manoharan, L. T. Anh, R. Nuryadi, H. Mizuta, and M. Tabe
  • Organizer: 63rd JSAP Spring Meeting
  • Place of Presentation: 東京工業大学（東京都目黒区）
  • Year and Date: 2016-03-19 – 2016-03-22
• [Presentation] First-principles study of the impact of inter-dopants interaction on their wavefunctions in downscaled P-B co-doped Si nanorods (2016)
  • Author(s): L. T. Anh, D. Moraru, M. Manoharan, M. Tabe, and H. Mizuta
  • Organizer: 63rd JSAP Spring Meeting
  • Place of Presentation: 東京工業大学（東京都目黒区）
  • Year and Date: 2016-03-19 – 2016-03-22
• [Presentation] Si中の個別ドーパントの物理と利用：FETとエサキダイオード (2016)
  • Author(s): 田部道晴、モラル ダニエル、サマンタ アルプ、水野武志
  • Organizer: ナノデバイステクノロジーワークショップ2016
  • Place of Presentation: 広島大学(広島県東広島市）
  • Year and Date: 2016-03-02
• [Presentation] Dynamical modification of the equivalent circuit with the bias voltage in a multiple-dopant system (2015)
  • Author(s): Arup Samanata, Daniel Moraru, Yuki Takasu, Takeshi Mizuno, Michiharu Tabe
  • Organizer: The 17th Takayanagi Kenjiro Memorial Symposium
  • Place of Presentation: 静岡大学 浜松キャンパス(静岡県浜松市）
  • Year and Date: 2015-11-17
  • Int'l Joint Research
• [Presentation] Atomic and molecular effects based on dopants in silicon nanodevices (2015)
  • Author(s): Daniel Moraru, Arup Samanta, Krzysztof Tyszka, Manoharan Muruganathan, Le The Anh, Takeshi Mizuno, Ryszard Jablonski, Hiroshi Mizuta, Michiharu Tabe
  • Organizer: ICSS Meeting
  • Place of Presentation: Holiday Inn Resort Phuket, Phuket, THAILAND
  • Year and Date: 2015-11-04 – 2015-11-07
  • Int'l Joint Research / Invited
• [Presentation] Effect of individual dopants in nano-SOI-MOSFETs and nano-pn-diodes (2015)
  • Author(s): Michiharu Tabe, Daniel Moraru, Arup Samanta, Krzysztof Tyszka, Hoang Nhat Tan, Yuuki Takasu, Ryszard Jablonski, Le The Anh, Hiroshi Mizuta, Takeshi Mizuno
  • Organizer: 228th ECS Meeting
  • Place of Presentation: Phoenix Convention Center,Phoenix, AZ, USA
  • Year and Date: 2015-10-11 – 2015-10-15
  • Int'l Joint Research / Invited
• [Presentation] Impact of dopant atoms on electron tunneling into nanoscale-transistor channels (2015)
  • Author(s): Daniel Moraru, Arup Samanta, Yuuki Takasu, Krzysztof Tyszka, Takeshi Mizuno, Ryszard Jablonksi, and Michiharu Tabe
  • Organizer: Inter-Academia 2015
  • Place of Presentation: Congress Center, Hamamatsu ACT CITY
  • Year and Date: 2015-09-28
  • Int'l Joint Research
• [Presentation] ドーパントによるバンド間トンネルの増強効果 (2015)
  • Author(s): Hoang Nhat Tan, Daniel Moraru, Le The Anh, Muruganathan Manoharan,Takeshi Mizuno, Hiroshi Mizuta, Michiharu Tabe
  • Organizer: 2015年第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場(愛知県名古屋市）
  • Year and Date: 2015-09-13 – 2015-09-16
• [Presentation] High-temperature single-electron tunneling transport through dopant-cluster in narrow channel SOI-FETs (2015)
  • Author(s): Arup Samanta, Daniel Moraru, Yuki Takasu, Takeshi Mizuno, Michiharu Tabe
  • Organizer: 2015年第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場(愛知県名古屋市）
  • Year and Date: 2015-09-13 – 2015-09-16
• [Presentation] Correlation between single-electron tunneling characteristics and potential landscapes in dopant-atom transistors (2015)
  • Author(s): Krzystof Tyszka, Daniel Moraru ,Arup Samanta, Takeshi Mizuno, Ryszard Jablonski, Michiharu Tabe
  • Organizer: 2015年第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場(愛知県名古屋市）
  • Year and Date: 2015-09-13 – 2015-09-16
• [Presentation] Physics of strongly-coupled dopant-atoms in nanodevices (2015)
  • Author(s): Daniel Moraru, Krzysztof Tyszka, Yuki Takasu, Arup Samanta, Takeshi Mizuno, Ryszard Jablonski and Michiharu Tabe
  • Organizer: The 14th International Conference on QiR
  • Place of Presentation: Hotel Lombok Raya, Lombok, INDONESIA
  • Year and Date: 2015-08-10 – 2015-08-13
  • Int'l Joint Research
• [Presentation] Recent progress in single-dopant atom devices (2015)
  • Author(s): Michiharu Tabe, Daniel Moraru, Arup Samanta and Takeshi Mizuno
  • Organizer: The 14th International Conference on QiR
  • Place of Presentation: Hotel Lombok Raya, Lombok, INDONESIA
  • Year and Date: 2015-08-10 – 2015-08-13
  • Int'l Joint Research / Invited
• [Presentation] Dopant-cluster-assisted tunnelling in Si nanodevices (2015)
  • Author(s): Michiharu Tabe, Daniel Moraru, Arup Samanta, Hoang Nhat Tan, Le The Anh, Muruganathan Manoharan, Hiroshi Mizuta and Takeshi Mizuno
  • Organizer: Silicon Quantum Electronics Workshop 2015
  • Place of Presentation: Kagawa International Conference Hall, KAGAWA
  • Year and Date: 2015-08-04
  • Int'l Joint Research
• [Presentation] Tunneling transport through single- and clustered-dopants (2015)
  • Author(s): Michiharu Tabe, Daniel Moraru, Arup Samanta, Hoang Nhat Tan, Le The Anh, Muruganathan Manoharan, Hiroshi Mizuta and Takeshi Mizuno
  • Organizer: ⅢBilateral Italy-Japan Seminar
  • Place of Presentation: Campus Plaza Kyoto, KYOTO
  • Year and Date: 2015-06-16
  • Int'l Joint Research / Invited
• [Presentation] Dopant-assisted tunnel-current enhancement in two-dimensional Esaki diodes (2015)
  • Author(s): Hoang Nhat Tan, Daniel Moraru, Krzysztof Tyszka, Anak Agung Ngurah Gde Sapteka, Sri Purwiyanti Surya, Le The Anh, Muruganathan Manoharan, Takeshi Mizuno, Ryszard Jablonski, Djoko Hartanto, Hiroshi Mizuta and Michiharu Tabe
  • Organizer: 2015 Silicon Nanoelectronics Workshop
  • Place of Presentation: Rihga Royal Hotel Kyoto, KYOTO
  • Year and Date: 2015-06-14 – 2015-06-15
  • Int'l Joint Research
• [Presentation] Impact of diffused donor-clusters near lead/channel boundary on high-temperature single-electron tunneling in narrow SOI-FETs (2015)
  • Author(s): Daniel Moraru, Arup Samanta, Yuuki Takasu, Krzysztof Tyszka, Takeshi Mizuno, Ryszard Jablonski, and Michiharu Tabe
  • Organizer: 2015 Silicon Nanoelectronics Workshop
  • Place of Presentation: Rihga Royal Hotel Kyoto, KYOTO
  • Year and Date: 2015-06-14 – 2015-06-15
  • Int'l Joint Research
• [Presentation] The impact of single donor and donor-acceptor pair on electronic and transport properities of silicon nanostructures (2015)
  • Author(s): Le The Anh, Daniel Moraru, Muruganathan Manoharan, Michiharu Tabe and Hiroshi Mizuta
  • Organizer: 2015 Silicon Nanoelectronics Workshop
  • Place of Presentation: Rihga Royal Hotel Kyoto, KYOTO
  • Year and Date: 2015-06-14 – 2015-06-15
  • Int'l Joint Research
• [Presentation] Position and number control of donor-QD potential by patttern-doping in SOI-FET channels (2015)
  • Author(s): Krzysztof Tyszka , Daniel Moraru, Takeshi Mizuno, Ryszard Jablonski and Michiharu Tabe
  • Organizer: 2015 Silicon Nanoelectronics Workshop
  • Place of Presentation: Rihga Royal Hotel Kyoto, KYOTO
  • Year and Date: 2015-06-14 – 2015-06-15
  • Int'l Joint Research
• [Presentation] Tunneling via single and coupled dopant atoms in Si nanodevices (2015)
  • Author(s): Daniel Moraru, Arup Samanta, Krzysztof Tyszka, Le The Anh, Muruganathan Manoharan, Takeshi Mizuno, Ryszard Jablonski, Hiroshi Mizuta and Michiharu Tabe
  • Organizer: EMN Meeting on Quantum Technology
  • Place of Presentation: Beijing Xijiao Hotel, Beijing, CHINA
  • Year and Date: 2015-04-14 – 2015-04-17
  • Int'l Joint Research / Invited
• [Book] Nanoscale Silicon Devices Chapter 8: “Dopant-Atom Silicon Tunneling Nanodevices” (2015)
  • Author(s): Daniel Moraru and Michiharu Tabe
  • Total Pages: 288
  • Publisher: CRC Press
• [Remarks] 静岡大学 電子工学研究所 モラルダニエル研究室ホームページ
  • URL: http://www.morarulab.wordpress.com
• [Remarks] 静岡大学 電子工学研究所 田部道晴研究室ホームページ
  • URL: http://www.rie.shizuoka.ac.jp/~nanohome