Development of High-Speed and High-Accuracy Electromagnetic Simulation Technology for RF Integrated Circuits

2017 Fiscal Year Final Research Report

• Project/Area Number: 26820139
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Communication/Network engineering
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Hirano Takuichi 東京工業大学, 環境・社会理工学院, 助教 (60345361)
• Project Period (FY): 2014-04-01 – 2018-03-31
• Keywords: 電子デバイス・集積回路 / マイクロ波・ミリ波・テラヘルツ波 / 微細プロセス技術 / アンテナ / ダミーメタル / 電磁界解析 / 実効媒質定数

Outline of Final Research Achievements

Electromagnetic simulation technology to extract effective material properties of metal dummy fills and lines is developed. Effective material properties are analyzed from propagation constant by considering a unit cell of the structure via eigenmode analysis. Measured and calculated frequency characteristic of reflection coefficient are compared for a 60 GHz band on-chip dipole antenna. It was confirmed that the calculated value agrees very well with the measured one when the effective material property of the dummy metal fills were considered. The proposed technique using effective material property enables high speed and accurate analysis of dummy metal fills in a CMOS chip.

Free Research Field

通信・ネットワーク工学