Development of nano-porous SiO2 electret and its application to vibration energy Hervester

2017 Fiscal Year Final Research Report

• Project/Area Number: 26870728
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nano/Microsystems; Nanomaterials engineering
• Research Institution: Kansai University
• Principal Investigator: SUZUKI Masato 関西大学, システム理工学部, 准教授 (70467786)
• Project Period (FY): 2014-04-01 – 2018-03-31
• Keywords: マイクロマシン / ナノテクノロジー / エナジーハーベスティング / エレクトレット

Outline of Final Research Achievements

We have successfully developed some kinds of electrets made of nano-porous SiO2 or mixture of a fluoropolymer and nano-particles. Density of electrical charges trapped in the developed electret is higher than that of electret made of normal SiO2 or fluoropolymer.
We have also developed electrets with nano/micro scaled texture. Stiction force between the electret and a movable electrode becomes smaller by forming the texture on the surface of the electret.
By using the above-mentioned high performance electret, the efficiency of the vibration energy harvester was improved.

Free Research Field

工 学