1985 Fiscal Year Final Research Report Summary
Development of nitride targets with a new RF-discharge reactive sputtering apparatus with magnetron.
| Project/Area Number |
58840006
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
核・宇宙線・素粒子
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| Research Institution | The University of Tokyo |
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Principal Investigator |
SUGAI Isao 東京大学, 原核研, その他 (80150291)
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| Project Period (FY) |
1983 – 1985
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| Keywords | Nuclear Target / Sputtering / Magnetron / RF-Discharge / 薄膜形成 |
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| Research Abstract |
We have designed and constructed a new RF-discharge reactive sputtering apparatus with magnetron. By using the apparatus, we have developed a method to make nitride targets and successfully prepared such as TiN, NbN and AiN targets.
The purity of the targets has been investigated by means of elastic scattering of 65 MeV alpha particles from INS-SF cyclotron.
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