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1987 Fiscal Year Final Research Report Summary

Development of Plasma Filament Oxygen Ion Source.

Research Project

Project/Area Number 60890010
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research Field 広領域
Research InstitutionInstitute of Research and Development,Tokai University

Principal Investigator

TAKAYAMA Kazuo  Prof. Institute of Research and Development, Tokai University., 開発技術研究所, 教授 (20023690)

Co-Investigator(Kenkyū-buntansha) FUKUI Ryota  R/D Div. ULVAC Coap., 技術開発部, 研究員
TAKAGI Kenichi  R/D Div. ULVAC Coap., 技術開発部, 研究員
SUNAKO Katsuhiko  Ass. Prof. Department of Physics, Faculty of Science, Tokai University., 理学部物理学科, 助教授 (50056016)
YABE Eiji  Ass. Prof. Institute of Research and Development, Tokai University., 開発技術研究所, 助教授 (70056018)
ISOYA Akira  Prof. Institute of Research and Development, Tokai University., 開発技術研究所, 教授 (80037134)
Project Period (FY) 1985 – 1987
Keywordsion / イオン / イオン源
Research Abstract

A plasma filament ion source has been developed as a long lifetime ion source for use in ion implanters. In this ion source, a plasma filament replaces a conventional metallic filament used in a Freeman type ion source. This ion source consists of two compartments, i.e. a plasma generator and an ion source chamber interconnected by a tapered narrow duct. The pressure difference between the two parts made by differential pumping prevents the feed gas from flowing into the plasma generator. With any combination of a plasma filament of either argon or neon and a feed gas of either AsF_5 or PF_5, the lifetime was found to be more than 90 h with an extraction voltage 40 KV and a corresponding ion current density of 20mA/cm^2; a considerable amount of as^+ and P^+ ions were observed in mass spectra. This ion source is eminently suitable for oxygen ion production and useful for realizaing a full cryopumping ion implanter system.

  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] E.YABE: Proc. Int. Ion Engng.Congr.-ISTA'83, and IPAT'83, Kyoto.1. 403-406 (1983)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Proc. 8th Symp. on ISIAT'84, Tokyo.1. 93-96 (1984)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Nucl. Instrum. Methods.B6. 119-122 (1985)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Proc. 9th. Symp. on ISTAT'85, Tokyo.1. 51-54 (1985)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YaBE: Proc.5th. Int. Conf. on IPAT'85, Munich. 1. 126-129 (1985)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Vacuum. 36-1-3. 43-46 (1986)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 矢部 栄二: "プラズマプロセッシング研究会"資料. 1. 186-189 (1986)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 矢部栄二: 東海大学紀要工学部. 26-2. 115-123 (1986)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Nucl.Instrum.Methods. B21. 190-193 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Rew.Sci.Instrum.58-1. 1-5 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: Jpn. J. Appl. Phys.26-7. 1179-1184 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.FUKUI: Proc. 10th.Symp. on ISTAT'86. 1. 87-90 (1986)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.SHIBUYA: Proc. 11th. Symp. on ISIAT'87,Tokyo. 1. 75-78 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.SHITOMI: Proc. 11th. Symp. on ISIAT'87,Tokyo. 1. 71-74 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.SHIBUYA: Proc.8th. Int. Conf. on ISPC'87,Tokyo. 4. 2172-2175 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.SHITOMI: Proc. 8th. Int. Conf. on ISPC'87,Tokyo. 4. 2162-2165 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] E.YABE: "An Ion Source sith Plasma Generator" Proc. 8th. Symp< on ISIAT'84, Tokyo.1. 93-96 (1984)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "An Ion Source with Plasma Generator" Nucl. Instrum. Methods,. b6. 119-122 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "A Plasma Filament Type Ion Source" Proc. 9th. Symp. on ISIAT'85, Tokyo.1. 51-54 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.Yabe: "Plasma Filament Type Ion Source" Proc. 5th. Int. Conf. on IPAT'85, Munich.1. 126-129 (1985)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "Plasma Filament Ion Source" Vacuum. 36-1-3. 43-46 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "An Ion Source Using Plasma as a Heat Filament Proc. Int. Ion Engng. Congr. -ISIAT'83 and IPAT'83, Kyoto." 1. 403-406 (1983)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "Plasma Filament Ion Source for High Current Implantor" Nucl. Instrum. Methods,. b21. 190-193 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "Ion Source with Plasma Cathode" Rev. Sci. Instrum.58-1. 1-5 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.YABE: "Production of Ion Beam Using Plasma Filament Ion Source" Jpn. J. Appl. Phys.26-7. 1179-1184 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Fukui: "Plasma Filament Ion Source for High Current Implanter" Proc. 10th. Symp. on ISIAT'86. 1. 87-90 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.SHIBUYA: "Plasma Catghode Oxygen Ion Source" Proc. 11th. Symp. on ISIAT'87, Tokyo.1. 75-78 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.SHITOMI: "Plasma Catrhode Ion Source for Ion Beam Assisted Deposition" Proc. 11th. Symp. on ISIAT'87, Tokyo.1. 71-74 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.SHIBUYA: "Oxygen Ion Source with Plasma Cathode" Proc. 8th. Int. Conf. on ISPC'87,Tokyo.4. 2172-2175 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.SHITOMI: "Plasma Cathode Oxygen Ion Source for Ion Beam Assisted Deposition" Proc. 8th. Int. on ISPC'87, Tokyo. 4. 2162-2165 (1987)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1989-03-30  

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