1987 Fiscal Year Final Research Report Summary

Real Time Electron Beam Testing Method

Research Project

Project/Area Number	61460141
Research Category	Grant-in-Aid for General Scientific Research (B)
Allocation Type	Single-year Grants
Research Field	電子機器工学
Research Institution	Osaka University
Principal Investigator	FUJIOKA Hiromu Faculty of Engineering,Osaka University, 工学部, 助教授 (40029228)
Project Period (FY)	1986 – 1987
Keywords	Electron Beam Testing / Real Time Measurement / 2次電子検出器
Research Abstract	With the trend in integrated circuit developments towards faster operating speed and increasing packing density, electron beam testing by scanning electron microscope stroboscopy has becme an indispensably important method and has been widely used in the various phases of semiconductor manufacturing. This stroboscopic method, however, has a basic drawback that signals with low repetition rates or nonrepetitive signals cannot be detected. To overcme this drawback, a real time electron beam testing system which consists of a scanning electron microscope, a broadband signal detection system, and a digitizing oscilloscope has been developed. By using the real time system, voltage signals on the integrated circuits with low repetition rates of 0.1 ms- 20 ms can be measured with a high time resolution of 10 ns.