1987 Fiscal Year Final Research Report Summary
Measurements of thin-film acoustic properties by line-focus-beam acoustic microscope.
| Project/Area Number |
61460145
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
計測・制御工学
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| Research Institution | Tohoku University |
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Principal Investigator |
CHUBACHI Noriyoshi Tohoku University, Faculty of Engineering, 工学部, 教授 (20006224)
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| Co-Investigator(Kenkyū-buntansha) |
SANNOMIYA Toshio Tohoku University, Faculty of Engineering (KAWAZOE,Yosh), 工学部, 技官
KUSHIBIKI Jun-ichi Tohoku University, Faculty of Engineering, 工学部, 助教授 (50108578)
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| Project Period (FY) |
1986 – 1987
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| Keywords | Line-focus-beam acoustic microscope / Acoustic properties / Leaky surface acoustic waves / Quantitative measurement / Velocity / Attenuation / Velocity dispersion / Dielectric films / SiO / SiN,ZnO piezoelectric films / ZnO single crystalline films / ZnO圧電薄膜 / ZnO単結晶膜 / イオン注入層 |
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| Research Abstract |
Recently, the line-focus-beam (LFB) acoustic microscope has been expected to be a new technology in scientific and industrial fields. This technology is applicable to the quantitative material characterization for all kinds of sample configurations, including thin-film layered or diffusion-layered structure as well as semi-infinite samples, The most remarkable features of the system are the following: proper anisotropy detection of material properties, very high measurement accuracy, and nondestructive and noncontacting evaluation. The material characterization is made by determining acoustic properties of materials, viz., velocity and attenuation of leaky waves propagating on the boundary between a sample and its coupling liquid of water. The measurements are made through the so-called V(z) curve analysis. It has been demonstrated that the system is a powerful tool for the analysis of materials, especially, acoustic anisotropy, acoustic inhomogeneity, structural analysis of polycrysta
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lline materials, and determination of elastic constants.
This project aims at making a new application of the LFB acoustic microscope to measurements of thin-film acoustic properties. To discuss the application in comparison with experiments, we should understand the propagation characteristics of leaky waves associated with the measurements. For the purpose, a theoretical analysis of the characteristics for thin-film layered structures has been developed to make a computer program. Velocity dispersion curves for relevant leaky wave modes as functions of the acoustic frequency and film thichness have been numerically calculated for some sample configurations employed in the following experiments. Some experiments have been made uxing a sapphire LFB lens at a frequency of 225 MHz. The LFB system gas been applied to : (1) precise measurements of Au films deposited on SiO_2 and (100)Si wafers, (2) evaluation of thin-film acoustic properties of dielectric films (IO_2, SiN_x) on (100)InP, ZnO polycrystalline films on SiO_2 and ZnO single crystal films on Z-cut sapphire, and epitaxial films of (Al_xGa_<1-x>As) on (100)GaAs, and (3) characterzation of ion (P or As) implanted area in (100) Si wafers, These results prove, in the near future, that the LFB acoustic microscope system will become a useful research tool in material characterization of as-grown thin films as well as implanted and diffused layers in electronic devices. Less
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