1988 Fiscal Year Final Research Report Summary
DEVELOPMENT OF A NOVEL HIGH-EFFICIENCY HIGH-BRIGHTNESS ULTRAVIOLET AND VACUUM-ULTRAVIOLET LIGHT SOURCE (EXCIMER FLASH LAMP)
| Project/Area Number |
62460137
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子機器工学
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| Research Institution | KEIO UNIVERSITY |
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Principal Investigator |
OBARA Minoru KEIO UNIVERSITY, 理工学部, 助教授 (90101998)
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| Co-Investigator(Kenkyū-buntansha) |
NAKAMURA Yoshiharu KEIO UNIVERSITY, 理工学部, 助教授 (90051763)
NOGUCHI Akira KEIO UNIVERSITY, 理工学部, 教授 (90051648)
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| Project Period (FY) |
1987 – 1988
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| Keywords | EXCIMER / MICROWAVE DISCHARGE / ULTRVIOLET LIGHT SOURCE / VACUUM ULTRVIOLET LIGHT SOURCE / パルス放電 / マイクロ波放電 |
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| Research Abstract |
1. Operatinal regime of excimer flash lamp with a high intrinsic efficiency could be obtained numerically by a comprehensive excimer discharge kinetic code.
2. Using a longitudinal discharge in a mixture of F_2/Kr^' He=0.1/7.5/92.4(%) at 75 Torr, a KrF fluorescence pulse (248nm) of up to 2.5usec was obatined. The fluorescence pulse was decreased with increasing F_2 donor concentration.
3. Figh-repetition-rate operation of ArF and KrF excimer lamp pumped by a microwave discharge was achieved at up to 100 kHz.
4. A quasi-continuous operation of ArF and KrF excimer lamp pumped by a microwave discharge was also achieved.
5. With an ArF lamp (193nm) pumped by a pulse microwave dischrge at 55 kHz, the fluorescence output obtained was 31.5W with an intrinsic efficiency of 8.2%. With a quasi-continuous poeration, the ArF fluorescence output was 28.8W obtained with an intrinsic efficiency of 4.4%
6. As for KrF lamps, an KrF fluorescence output of 43W was obtaained with an intrinsic efficiency of 12.5%, which was pumped by a high-repetion-rated microwave discharge (55kHz). An KrF fluorescence output was obtained at 56W with an efficiency of 8.3%, which was pumped by a quasi-cw microwave discharge.
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