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1989 Fiscal Year Final Research Report Summary

SYNTHESIS OF NON-EQUILIBRIUM THIN FILMS, SUCH AS DIAMOND AND CUBIC BORON NITRIDE, WITH PLASMAS

Research Project

Project/Area Number 62470068
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 無機工業化学
Research InstitutionAoyama Gakuin University

Principal Investigator

MATSUMOTO Osamu  AOYAMA GAKUIN UNIVERSITY DEPARTMENT OF CHEMISTRY, PROFESSOR, 理工学部, 教授 (80082759)

Project Period (FY) 1987 – 1989
KeywordsDiamond / Hexagonal BN / Plasma / Non-equilibrium phase / Thin film Synthesis / プラズマジェット / ECR
Research Abstract

1. (1) When diamond was deposited from methane -hydrogen Plasma prepared using microwave discharge, graphite, which was codeposited with diamond was removed with atomic hydrogen by a chemical sputtering. Diamond was deposited from a carbon monoxide-hydrogen plasma prepared using microwave discharge. In this case, the reaction scheme, which diamond was deposited through CH_x radicals which were prepared by the Fischer-Tropsch reaction between CO and H_2, proposed.
(2) An addition of several vol.% of hydrogen into the argon-methane plasma jet was necessary to deposit diamond using plasma jet under reduced pressure. In the deposition of diamond, the deposits were changed with changing the substrate materials. This would be due to the solubility of hydrogen into the substrate materials.
2. From the pure methane plasma prepared by the ECR apparatus, a transparent as well as semi conducting polymer thin film was deposited on the substrate placed at the ECR resonant point on the wall of the fused silica tube. The film may contain a small amount of conducting materials, such as graphite, and consist of a three dimensional cross-linked network including conjugated double bond.
3. Boron nitride was deposited by the reaction of B_2H_6 with nitrogen in a microwave discharge. The deposition of hexagonal wurzite type and cubic type BN thin films on the substrate set in the tail of the discharge was detected. As NH and BH radicals identified in the discharge, these radicals reacts on the substrate and BN was formed.

  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] O.Matsumoto: "Effect of Dilution Gases in Methane on the Deposition of Diamond-like Carbon in Microwave Discharge III Effect of Hydrogen" Thin Solid Films. 146. 283-289 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] O.Matsumoto: "Deposition of Boron Nitride in Microwave Discharge" Proceedings CVD-X. 552-561 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] O.Matsumoto: "Deposition of Transparent Boron Nitride Thin Films in a Microwave Discharge" Denki Kagaku. 56. 478-481 (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kotaki: "Carburizing of Titanium with Plasma Jet under Reduced Pressure" Plasma Chem.Plasma Process.8. 91-100 (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Furukawa: "Carburizing of Titanium and Diamond Deposition on Titanium in Argon-Methane-Hydrogen Plasma Jet under Reduced Pressure" Denki Kagaku. 56. 779-780 (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] O.Matsumoto: "Diamond Deposition on Some Transition Metal Substrate with Plasma Jet unde Reduced Pressure" Proceeding ISPC-9. 1427-1432 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Fujita: "Deposition of Carbonaceous Films using ECR Plasma Apparatus,Deposition of Colorless,Transparent and Semicondutin Film from Methane Plasma" J.Electrochem.Soc.136. 2625-2630 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Fujita: "Deposition Scheme of Transparent and Semiconduting Polymer Films from Methane Plasma prepared usin ECR Apparatus" J.Electrochem.Soc.(印刷中). 137. (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Furukawa: "Diamond Deposition with Plasma Jet under Reduced Pressure" IEEE,Trans.Plasma Science(投稿中). (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Hayashi: "Effect of Dilution Gases in Methane on The Deposition of Diamond-like Carbon in a Microwave Discharge III-Effect of Rare Gases" Thin Solid Films(投稿中). (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] O. Matsumoto: "Effect of Dilution Gases in Methane on the Deposition of Diamond-like Carbon in Microwave Discharge, II Effect of Hydrogen" Thin Solid Films, 146, 283-289 (1987).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] O. Matsumoto: "Deposition of Boron Nitride in Microwave Discharge" Proceedings CVD-X, 552-561 (1987).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] O. Matsumoto: "Deposition of Transparent Boron Nitride Thin Films in a Microwave Discharge" Denki Kagaku, 56, 478-481 (1988).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R. Furukawa: "Carburizing of Titanium and Diamond Deposition on Titanium in Argon-Methane-Hydrogen Plasma Jet under Reduced Pressure" Denki Kagaku, 56, 779-780 (1988).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] O. Matsumoto: "Diamond Deposition on Some Transition Metal Substrates with Plasma Jet under Reduced Pressure" Proceedings ISPC-9, 1427-1432 (1989).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Fujita: "Deposition of Carbonaceous Films Using ECR Plasma Apparatus, Deposition of Colorless, Transparent and Semiconducting Film from Methane Plasma" J. Electrochem. Soc., 136, 2625-2630 (1989).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Fujita: "Deposition Scheme of Transparent and Semiconducting Polymer Films from Methane Plasma Using ECR Apparatus" J. Electrochem. Soc., (1990).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R. Furukawa: "Diamond Deposition with Plasma Jet under Reduced Pressure" IEEE, Trans. Plasma Science.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] F. Hayashi: "Effect of Dilution Gases in Methane on the Deposition of Diamond-like Carbon in a Microwave Discharge, III Effect of Rare Gases" Thin Solid Films,.

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-03-26  

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