1988 Fiscal Year Final Research Report Summary
Scanning capacitance decimicron microscope
| Project/Area Number |
62550288
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子機器工学
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| Research Institution | Osaka University |
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Principal Investigator |
TAMURA Shinichi Osaka University Medical School (Professor), 医学部, 教授 (30029540)
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| Co-Investigator(Kenkyū-buntansha) |
TOKUTAKA Heizo Faculty of Engineering, Tottori University (Professor), 工学部, 教授 (70032266)
YAMANAKA Masanobu Faculty of Engineering, Osaka University (Associate Professor), 工学部, 助教授 (10029118)
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| Project Period (FY) |
1987 – 1988
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| Keywords | Electro-static capacitance / Microscope / VHD / Imaging / Piezoelectric actuator / Slightly-moving-stage / STM |
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| Research Abstract |
In this research, the object surface is scanned with a micro-capacitance probe (stylus) and piezoelectric actuator such as PZT two-dimensionally or 2.5-dimensionally, and its capacitance variat ion is visualized as an image. The system is devised as follows:
1) Driving method: since there are two kinds of driving mechnism of stage-driving and stylus-driving, both methods are tested for comparison. Then, we got a conclusion that the stylus-driving method is better than the stage-driving. Therefore, we adopted a mechanism of driving XYZ the stylus directly by the piezoelectric actuators.
2) Coarse height adjustment mechanism: We set a micrometer for the coarse adjusting along the hight. Further, we tried to set an oblieque optical microscope for confirming the stylus hight. Thus, we devised a mechanism for adjusting the hight of the stylus manually while confirming its hight with the optical microscope.
3) Fine hight driving mechanism: As a fine driving mechanism for scanning the object surface plane two-dimensionally, or scanning 2.5 dimensionally, we devised a driving mechanism with the piezoelect ric actuators according to the detected capacitance, that is detector output.
By these effort, it is proved that it is possible enough to realize the resolution power of 0.1mum. As yet, the reapeatability of the hight detection is high enough. However, the repeatability of of the lateral directions in lacking. The rough power of the present system is, resolution power : 0.1 mum+alpha, maximum scanning range: 20 mum x 20 mum, tip size of the capacitance sytlus is 0.1 mum x 0.1 mum, scanning time is 20 sec (20 mum x 20 mum) or 4 sec (5 mum x 5 mum). It should be discussed how to use the scanning capacitance microscope for the guide of the STM, and for the super high density memory (several ten times of optical disc).
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