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1989 Fiscal Year Final Research Report Summary

Crystal growth of p type ZnS by MBE and its application to light emitting device.

Research Project

Project/Area Number 63550230
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionNagaoka University of Technology

Principal Investigator

KANEDA Shigeo  Professor of Nagaoka University of Technology, 工学部, 教授 (00029406)

Co-Investigator(Kenkyū-buntansha) KAMBAYASHI Toshio  Assistant Professor of Nagaoka University of Technology, 工学部, 助教授 (20111669)
FUJII Nobuyuki  Professor of Nagaoka University of Technology, 工学部, 教授 (50011119)
Project Period (FY) 1988 – 1989
Keywordsmolecular beam epitaxy (MBE) / compound semiconductor ZnS / Laser irradiation during MBE growth / Light emitting device
Research Abstract

As the results of numerous experimental studies, we obtained many useful knowledges as mentioned below. 1. Single crystal of ZnS having high quality can be grown by molecular beam epitaxy under the suitable growth conditions, and the various growth mechanisms become clear. 2. The crystallinity is much related to the growth conditions such as : the molecular beam strengths and the ratio of each supplied molecular beam, thermal cracking temperature of molecular beam, film thickness, crystal surface of used substrate crystal, substrate temperature and so on. 3. Sodium doping for p type ZnS can be easily performed using Na_2S solid state molecular source but the crystallinity becomes somewhat worse. 4. The irradiation of short wave laser light such as ArF excimer laser is effective to improve the crystallinity for both undoped and doped ZnS crystal. 5. It can be concluded that the application to the practical device can be probably realized by this method.

Research Products

(8 results)

All Other

All Publications (8 results)

  • [Publications] 鹿野文久、伏見浩、蒲原敦彦、横山明聡、金田重男: "MBE法により成長した不純物添加ZnSの結晶評価" 日本学術振興会薄膜第131委員会 第141回研究会論文集. No.10. 54-59 (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kaneda,T.Shimoguchi,H.Takahashi,S.Motoyama,F.Kano,M.Yokoyama and S.Satou: "Optimum growth condition of single-crystalline undoped ZnS grown by the molecular-beam-epitaxial method using a H_2S gas source." Journal of Applied Physics. 64. 3945-3948 (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Motoyama and S.Kaneda: "Low temperature growth of single crystalline 3C-SiC by the gas source molecular beam epitaxial method." Applied Physics Letters. 54. 242-243 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Motoyama,N.Morikawa and S.Kaneda: "Low temperature growth and its growth mechanism of 3C-SiC crystal by gas source molecular beam epitaxial method." Journal of Crystal Growth. 近刊. (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F. Kano, H. Fushimi, N. Kanbara, M. Yokoyama and S. Kaneda: "Crystal characterization of impurity doped ZnS grown by MBE method." Repts. of 141 Meeting, 131 Committee, Nippon Gakushin., No.10, 54-59 (1988).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kaneda, T. Shimoguchi, H. Takahashi, S. Motoyama, F. Kano, M. Yokoyama and S. Satou: "Optimum growth condition of single-crystalline undoped ZnS grown by the molecular-beam-epitaxial method using a H_2S gas source." Journal of Applied Physics, 64, 3945-3948 (1988).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Motoyama and S. Kaneda: "Low temperature growth of single crystalline 3C-SiC by the gas source molecular beam epitaxial method." Applied Physics Letters. 54, 242-243 (1989).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Motoyama, N. Morikawa and S. Kaneda: "Low temperature growth and its growth mechanism of 3C-SiC crystal by gas source molecular beam epitaxial method." Journal Crystal Growth, (1990).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-03-25  

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