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1990 Fiscal Year Final Research Report Summary

Development of Hollow Cathode Type Refractory Metal Ion Source

Research Project

Project/Area Number 63880003
Research Category

Grant-in-Aid for Developmental Scientific Research (B).

Allocation TypeSingle-year Grants
Research Field プラズマ理工学
Research InstitutionTokai University

Principal Investigator

TAKAYAMA Kazuo  R&D Institute, Tokai Univ. Prof., 開発技術研究所, 教授 (20023690)

Co-Investigator(Kenkyū-buntansha) FUKUI Ryota  ULVAC O-Project, Oプロジェクト, 主任
YAMAKAWA Hiroyuki  ULVAC R&D Division, 技術開発部, 部長
TONEGAWA Akira  Dept. of Physics, Tokai Univ. Assist., 理学部物理学科, 助手 (90197905)
SUNAKO Katsuhiko  Dept. of Physics, Tokai Univ. Prof., 理学部物理学科, 教授 (50056016)
YABE Eiji  R&D Institute, Tokai Univ. Prof., 開発技術研究所, 教授 (70056018)
Project Period (FY) 1988 – 1990
Keywordsion source / double hollow cathode / refractory metal / new sputter mode / metal ion production ratio / high current / ion beam
Research Abstract

Achievements fo our three-year research project on hollow cathode metal ion source are summarized below. We have developed a double hollow refractory metal ion source in order to increase the metal ion ratio and the ion beam current for new material productions and plasma processing. This ion source consists of two hollow cathode tubes with different diameters, connected inseries and made of refractory materials. The discharge path becomes narrow in the second hollow cathode, which is located between the first hollow cathode and an anode. An axial magnetic field serves to further compress the narrowed discharge path. The role of these structures of the ion source are as follows.
1. A high density plasma is formed inside the narrow canal of the second hollow cathode.
2. A negative high voltage (-800V) is applied to the second hollow cathode with respect to the anode, resulting in sputtering of the refractory material of this cathode.
3. The sputtering efficiency can be increased by increasing the negative voltage without affecting the main discharge conditions.
4. The sputtered refractory materials of the second hollow cathode can be effectively ionized by this high density plasma and a new discharge mode : hollow cathode discharge with inverse magnetron and return motions of beam electron the second hollow cathode. The results of our experiment are as follows.
1. Refractory materials (Mo or Ta) of the second hollow cathode can be effectively sputtered and ionized by this new discharge mode by changing its diameter from 4 to 8 mm.
2. At the sputter voltage from 400 to 700V, the metal ion ratio is -30-50% at the discharge current of 0.8A and magnetic field of 1kG.
3. In this conditions, the total ion beam current obtained is -9mA for a 20kV extracted voltage.

  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] H.Taguchi,J.Ono,A.Tonegawa,K.Takayama,: "″Discharge Characteristics of Double Hollow Cathode Metal Ion Source″" 第8回プラズマプロセシング研究会. 1. 101-104 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Tonegawa,H.Taguchi,J.Ono,K.Takayama,: "″Double Hollow Cathode Metal Ion Source″" 第1回粒子線の先端的応用技術に関するワ-クショップ. 1. 41-44 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Tonegawa,H.Taguchi,K.Takayama,: "″Double Hollow Cathode Ion Source for Metal IonーBeam Productions″" Nucl.Inst.& Meth.,to be acccpted.(1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Tonegawa,and K.Takayama,: "″Characteristics of LaB_6 Hollow Cathode in GlowーArc Transition″" Physical Review.42. 4898-4907 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Tonegawa,and K.Takayama,: "″Special Feature of Electron Energy Distribution Function of LaB_6 Hollow Cathode in GlowーArc Transition″" Phys.Lett.A.44. 179-182 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Taguchi,A.Tonegawa,K.Takayama,: "″Double Hollow Cathode Ion Source for Metal Ion Production of Refractory Materials″" Proc.13th.Sympo.on ISIAT´90.1. 71-74 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Taguchi, J. Ono, A. Tonegawa, and K. Takayama.: ""Discharge Characteristics of Double Hollow Catthode Metal Ion Source"" Proc. 8th Symp. Plasma Processing. 1. 101-104 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, T. Chida and K. Takayama.: ""Characteristics of a LaB_6 Hollow Cathode Tube"" Proc. 8th Symp. Plasma Processing. 1. 393-396 (1991)

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      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, H. Taguchi, J. Ono and K. Takayama.: ""Double Hollow Cathode Metal Ion Source"" Proc. 1th Workshop on Beam Eng. Adv. Material Synth.1. 41-44 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, H. Taguchi and K. Takayama.: ""Double Hollow Cathode Ion Source for Metal Ion-Beam Productions"" Nucl. Inst. & Meth.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa and K. Takayama.: ""Characteristics of LaB_6 Hollow Cathode in Glow-Arc Transition"" Physical Review A. 42. 4898-4907 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa and K. Takayama.: ""Special Feature of Electron Energy Distribution Function of LaB_6 Hollow Cathode in Glow-Arc Transition"" Phys. Lett. A. 44. 179-182 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, H. Taguchi, K. Nakadai and K. Takayama.: ""Electron energy distribution of LaB_6 Hollow Cathode"" J. Adv. Sci.Vol. 2, No. 1. 48-51 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Taguchi, K. Nose, A. Tonegawa and K. Takayama.: ""Double Hollow Cathode Metal Ion Source"" J. Adv. Sci.Vol. 2, No. 1. 48-51 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Taguchi, A. Tonegawa and K. Takayama.: ""Double Hollow Cathode Ion Source for Metal Ion Production of Refractory Materials"" Proc. 13th Sympo. on ISIAT'90, Tokyo. 1. 71-74 (1990)

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      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa,: ""Special feature of electron energy distribution function of LaB_6 hollow cathode discharge. "" Sanken-houkokusyu Tokai Univ.Vol. 20. 21-26 (1989)

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      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa and K. Takayama.: ""Measurements of Electron Energy Distribution Function of LaB_6 Hollow Cathode in Glow-Arc Transition"" 1989 Int. Conf. on Plamsa Physics (New Delhi, India). Vol. 3. 1229-1231 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Taguchi, A. Tonegawa and K. Takayama.: ""Double Hollow Cathode Metal Ion Source"" Proc. 12th Sympo. on ISIAT'90, Tokyo. 1. 37-40 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, H. Taguchi and K. Takayama.: ""Double Hollow Cathode Ion Source"" Proc. 12th Sympo. on ISIAT'90, Tokyo. 1. 56-62 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kogure, A. Tonegawa and K. Takayama.: ""Hollow Cathode Ion Source Developed for Metal Ions"" Nucl. Instrum. & Meth.B37. 201-204 (1989)

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      「研究成果報告書概要(欧文)」より
  • [Publications] K. Takayama.: ""Ouyou purazuma-kagaku ni tuite"" Plating and Coating. Vol. 8, No. 6. 268-273 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, H. Taguchi, S. Kogure and K. Takayama.: ""Ion energy distribution on the hollow cathode"" Plating and Coating. Vol. 8, No. 6. 302-306 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kogure, A. Tonegawa, K. Simokawa and K. Takayama.: ""Hollow cathode ion source for multi-species ion production"" Plating and Coating. Vol. 8, No. 6. 330-333 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A. Tonegawa, S. Kogure and K. Takayama.: ""Characteristics of hollow cathode discharge and its Application"" Denki-gakkai-houkokusyu. EP-88-85. 103-114 (1988)

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      「研究成果報告書概要(欧文)」より

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Published: 1993-08-12  

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