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Epitaxial growth and defect controlling technique of AlGaN with high AlN molar fraction

Planned Research

Project AreaOptoelectronics Frontier by Nitride Semiconductor -Ultimate Utilization of Nitride Semiconductor Material Potential-
Project/Area Number 18069006
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionMie University

Principal Investigator

HIRAMATSU Kazumasa  Mie University, 大学院・工学研究科, 教授 (50165205)

Co-Investigator(Kenkyū-buntansha) MIYAKE Hideto  三重大学, 大学院・工学研究科, 准教授 (70209881)
MOTOGAITO Atsushi  三重大学, 大学院・工学研究科, 助教 (00303751)
Research Collaborator MIYAGAWA Reina  三重大学, 大学院・工学研究科, 大学院生
MA Bei  三重大学, 大学院・工学研究科, 大学院生
LIU Yuhuai  三重大学, 非常勤研究員
LI Dabing  三重大学, 外国人研究者
WU Jiejun  三重大学, 外国人研究者
HU Weiguo  三重大学, 非常勤研究員
Project Period (FY) 2006 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥71,900,000 (Direct Cost: ¥71,900,000)
Fiscal Year 2010: ¥8,100,000 (Direct Cost: ¥8,100,000)
Fiscal Year 2009: ¥13,600,000 (Direct Cost: ¥13,600,000)
Fiscal Year 2008: ¥8,000,000 (Direct Cost: ¥8,000,000)
Fiscal Year 2007: ¥28,800,000 (Direct Cost: ¥28,800,000)
Fiscal Year 2006: ¥13,400,000 (Direct Cost: ¥13,400,000)
Keywords窒化物半導体 / エピタキシャル成長 / 貫通転位密度 / クラック / 反り / 無極性 / 深紫外光源 / 電子線励起 / MOVPE / 量子井戸 / 電子線照射 / 紫外線発光 / AlGaN / 転位密度 / a面 / HVPE / 減圧MOVPE / a面GaN / a面AlGaN / 成長圧力 / 選択成長 / 反射光モニタリング
Research Abstract

In this research, the studies on obtaining high quality AlN and AlGaN with high AlN molar fraction are carried out. High quality AlGaN with high AlN, nonpolar AlGaN and crack-free AlN substrate can be obtained. Furthermore by using these materials, the UV-C light source excited by electron beam is fabricated. The structures which we can obtain strong UV emission are found.

Report

(7 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report   Self-evaluation Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (162 results)

All 2011 2010 2009 2008 2007 Other

All Journal Article (45 results) (of which Peer Reviewed: 43 results) Presentation (104 results) Book (4 results) Remarks (9 results)

  • [Journal Article] aman Scattering Spectroscopy of Residual Stresses in Epitaxial AlN Films2011

    • Author(s)
      S.Yang, R.Miyagawa, H.Miyake, K.Hiramatsu, H.Harima
    • Journal Title

      Applied Physics Express 4

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Huge binding energy of localized biexcitons in Al-rich Al_xGa_<1-x>N2011

    • Author(s)
      R.Kittaka, H.Muto, H.Murotani, Y.Yamada, H.Miyake, K.Hiramatsu
    • Journal Title

      Applied Physics Letters

      Volume: 98

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Raman Scattering Spectroscopy of Residual Stresses in Epitaxial AlN Films2011

    • Author(s)
      S.Yang, R.Miyagawa, H.Miyake, K.Hiramatsu, H.Harima
    • Journal Title

      Applied Physics Express

      Volume: 4

    • NAID

      10028155120

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of High-Quality and Crack-Free GaN Growth on 3C-SiC/Separation by Implanted Oxygen2010

    • Author(s)
      M.Narukawa, H.Asamura, K.Kawamura, H.Miyake, K.Hiramatsu
    • Journal Title

      Japanese Journal of Applied Physics 49

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Facet control in selective area growth (SAG) of a-plane GaN by MOVPE2010

    • Author(s)
      .Ma, R.Miyagawa, H.Miyake , K.Hiramatsu
    • Journal Title

      Material Research Society Symposium Proceedings 1201

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of high quality c-plane AlN on a-plane sapphire2010

    • Author(s)
      R.Miyagawa, J.Wu, H.Miyake, K.Hiramatsu
    • Journal Title

      Material Research Society Symposium Proceedings 1201

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study of High-Quality and Crack-Free GaN Growth on 3C-SiC/Separation by Implanted Oxygen2010

    • Author(s)
      M.Narukawa, H.Asamura, K.Kawamura, H.Miyake, K.Hiramatsu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of high quality c-plane AlN on a-plane sapphire2010

    • Author(s)
      R.Miyagawa, J.Wu, H.Miyake, K.Hiramatsu
    • Journal Title

      Material Research Society Symposium Proceedings

      Volume: 1201

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Facet control in selective area growth (SAG) of a-plane GaN by MOVPE2010

    • Author(s)
      B.Ma, R.Miyagawa, H.Miyake, K.Hiramatsu
    • Journal Title

      Material Research Society Symposium Proceedings

      Volume: 1201

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deep Electronic Levels of Al_xGa_<1-x>N with a Wide Range of Al Composition Grown by Metal-Organic Vapor Phase Epitaxy2010

    • Author(s)
      K.Ooyama, K.Sugawara, S.Okuzaki, H.Taketomi, H.Miyake, K.Hiramatsu, T.Hashizume
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhanced deep ultraviolet emission from Si-doped Al_xGa_<1-x>N/AlN MQWs2010

    • Author(s)
      D.Li, W.Hu, H.Miyake, K.Hiramatsu, H.Song
    • Journal Title

      Chinese Physics B

      Volume: 19

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of the AlN Interlayer on the Distribution and Mobility of Two-Dimensional Electron Gas in AlGaN/AlN/GaN Heterojunctions2010

    • Author(s)
      W.Hu, B.Ma, D.Li, R.Miyagawa, H.Miyake, K.Hiramatsu
    • Journal Title

      Japanese Journal of Applied Physics 49

    • NAID

      40017033737

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural and electrical properties of Si-doped a-plane GaN grown on r-plane sapphire by MOVPE2009

    • Author(s)
      B.Ma, R.Miyagawa, W.Hu, D.Li, H.Miyake,K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2899-2902

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Photoluminesence study of Si-doped a-plane GaN grown by MOVPE2009

    • Author(s)
      D.Li, B.Ma, R.Miyagawa, M.Narukawa, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2906-2909

    • Related Report
      2010 Final Research Report 2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Substrate Plane on the Growth of High Quality AlN by Hydride Vapor Phase Epitaxy2009

    • Author(s)
      J.Wu, K.Okuura, H.Miyake, K.Hiramatsu
    • Journal Title

      Applied Physics Express 2

    • NAID

      10027011951

    • Related Report
      2010 Final Research Report 2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-pressure HVPE growth of crack-free thick AlN on a trench-patterned AlN template2009

    • Author(s)
      Y.Katagiri, S.Kishino, K.Okuura, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2831-2833

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural and electrical properties of Si-doped a-plane GaN grown on rplane sapphire by MOVPE2009

    • Author(s)
      B.Ma, R.Miyagawa, W.Hu, D.Li, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2899-2902

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical properties of MOVPE-grown a-plane GaN and AlGaN2009

    • Author(s)
      M.Narukawa, R.Miyagawa, B.Ma, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2903-2905

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of undoped and Zn-doped GaN nanowires2009

    • Author(s)
      M.Narukawa, S.Koide, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 2970-2972

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-plane electric field induced by polarization and lateral photovoltalic effect in a-plane GaN2009

    • Author(s)
      W.Hu, B.Ma, D.Li, H.Miyake, K.Hiramatsu
    • Journal Title

      Applied Physics Letters 94

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of initial conditions and growth temperature on the properties of nonpolar a-plane AlN grown by LP-HVPE2009

    • Author(s)
      J.Wu, Y.Katagiri, K.Okuura, D.Li, H.Miyake, K.Hiramatsu
    • Journal Title

      Physica Status Solidi (c) 6

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of initial stages on the crystal quality of nonpolar a-plane AlN on r-plane sapphire by low-pressure HVPE2009

    • Author(s)
      J.Wu, Y.Katagiri, K.Okuura, D.Li, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 3801-3805

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nitridating r-plane sapphire to improve crystal qualities and surface morphologies of a-plane GaN grown by metalorganic vapor phase epitaxy2009

    • Author(s)
      B.Ma, W.Hu, H.Miyake, K.Hiramatsu
    • Journal Title

      Applied Physics Letters 95

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence ofoff-cutangleof r-plane sapphireonthecrystalqualityof nonpolar a-plane AlNbyLP-HVPE2009

    • Author(s)
      J.Wu, K.Okuura, K.Fujita, K.Okumura, H.Miyake, K.Hiramatsu
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 4473-4477

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of crack-free AlGaN ons elective-area-growth GaN2008

    • Author(s)
      H.Miyake, N.Masuda, Y.Ogawahara, M.Narukawa, K.Hiramatsu, et al.
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 4885-4887

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reactor-pressure dependence of growthof a-plane GaN on r-plane sapphire2008

    • Author(s)
      R.Miyagawa, M.Narukawa, B.Ma, H.Miyake, K.Hiramatsu.
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 4979-4982

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Improved surface morphology of flow-modulated MOVPE grown AlN on sapphire using thin medium-temperature AlN buffer layer2008

    • Author(s)
      D.Li, M.Aoki, H.Miyake, K.Hiramatsu
    • Journal Title

      Physica Status Solidi (c) 5

      Pages: 1818-1821

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Selective area growth of III-nitride and their application for emitting devices2008

    • Author(s)
      K.Hiramatsu, H.Miyake, D.Li
    • Journal Title

      Journal of Light & Visual Environment 32

      Pages: 177-182

    • NAID

      110006663908

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Gro wth of crack-free AlGaN ons elective-are a-growth GaN2008

    • Author(s)
      H. Miyake, N. Masuda, Y. Ogawahara, M. Narukawa, K. Hiramatsu et al.
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 4885-4887

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Reactor-pres sure dependence of growthof a-plane Ga N on r-plane sapphire2008

    • Author(s)
      R. Miyagawa, M. Narukawa, B. Ma, H. Miyake and K. Hiramatsu.
    • Journal Title

      Journal of Cryst al Growth 310

      Pages: 4979-4982

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Improved surface morphology of flow-modulated MOVPE grown AlN on sapphire using thin medium-temperature AlN buffer layer2008

    • Author(s)
      D. Li, M. Aoki, H. Miyake and K. Hiramatsu
    • Journal Title

      Physica Status Solidi (c) 5

      Pages: 1818-1821

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Selective area growth of III-nitride and their application for emitting devices2008

    • Author(s)
      K. Hiramatsu, H. Miyake and D. Li
    • Journal Title

      Journal of Light & Visual Environment 32

      Pages: 177-182

    • NAID

      110006663908

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Selective Area Growth of III-Nitride and Their Application for Emitting Devices2008

    • Author(s)
      K. Hiramatsu, H. Miyake and D. Li
    • Journal Title

      Journal of Light & Visual Environment 32

      Pages: 177-182

    • NAID

      110006663908

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improved surface morphology of flow-modulated MOVPE grown AlN on sapphire using thin medium-temperaturl A1N buffer layer2008

    • Author(s)
      D. Li, M. Aoki, H. Miyake and K. Hiramatsu
    • Journal Title

      Physica Status Solidi c 5

      Pages: 1818-1821

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improved optical properties of AlGaN using periodic structures2008

    • Author(s)
      H.Miyake, T. Ishii, A. Motogaito and K.Hiramatsu
    • Journal Title

      Physica Status Solidi c 5

      Pages: 1822-1824

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermal analysis of GaN powder formation via reaction of gallium ethylenediamine tetraacetic acid complexes with ammonia2008

    • Author(s)
      Y. Liu, S.Koide, H.Miyake, K.Hiramatsu, et.al.
    • Journal Title

      Physica Status Solidi c 5

      Pages: 1522-1524

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of crack-free AlGaN ons elective-area-growth GaN2008

    • Author(s)
      H. Miyake, N.Masuda, Y. Ogawahara, M. Narukawa, K.Hiramatsu, et.al.
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 4885-4887

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reactor-pressure dependence of growth of a-plane GaN on r-plane sapphire2008

    • Author(s)
      R. Miyagawa, M. Narukawa, B. Ma, H. Miyake and K. Hiramatsu
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 4979-4982

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Supression of crack generation using high-compressive-strain AlN/Sapphire template for hydride vapor phase epitaxy of thick AlN film2007

    • Author(s)
      K.Tsujisawa, S.Kishino, D.Li, H.Miyake, K.Hiramatsu, et al.
    • Journal Title

      Japanese Journal of Applied Physics 46

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Blue emission from InGaN/GaN hexagonal pyramid structures2007

    • Author(s)
      H.Miyake, K.Nakao, K.Hiramatsu
    • Journal Title

      Superlattices and Microstructures 41

      Pages: 341-346

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Supression of c rack generation using high-compressive-s train AlN/Sapphire template for hydride vapor phase epitaxy of thick AlN film2007

    • Author(s)
      K. Tsujisawa, S. Kishino, D. Li, H. Miya ke, K. Hiramatsu et al.
    • Journal Title

      Japanese Journal of Applied Physics 46

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Blue emission from InGaN/GaN hexagonal pyramid structures2007

    • Author(s)
      H. Miyake, K. Nakao and K. Hiramatsu
    • Journal Title

      Superlattices and Microstructures 41

      Pages: 341-346

    • Related Report
      2008 Self-evaluation Report 2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Supression of crack generation using high-compressive-strain AIN/Sapphire template for hydride vapor phase epitaxy of thick AIN film2007

    • Author(s)
      K. Tsujisawa, S. Kishino, D. Li, H. Miyake, K. Hiramatsu, et. al.
    • Journal Title

      Japanese Journal of Applied Physics 46

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Selective area growth of III-nitride and their application for emitting devices2007

    • Author(s)
      K. Hiramatsu, H. Miyake and D. Li
    • Journal Title

      Proc. 1st International Confernce on White LEDs and Solid State Lighting

      Pages: 72-77

    • NAID

      110006663908

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Blue Emission from InGaN/GaN Hexagonal Pyramid Structures

    • Author(s)
      H.Miyake, K.Nakao, K.Hiramatsu
    • Journal Title

      Superlattices and Microstructures (掲載決定)

    • Related Report
      2006 Annual Research Report
  • [Presentation] Homo-epitaxial growth of thick AlN film by HVPE2011

    • Author(s)
      H.Miyake
    • Organizer
      7th International Workshop on Bulk Nitride Semiconductors (IWBNS-VII 2011)
    • Place of Presentation
      高野山大学
    • Year and Date
      2011-03-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] サファイア上へのAlN成長における界面層の評価(2)2011

    • Author(s)
      宮川鈴衣奈, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 減圧HVPE法によるAlNホモエピタキシャル成長2011

    • Author(s)
      野村拓也, 奥村健太, 三宅秀人, 平松和政, 江龍修, 福山博之
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 周期溝加工c面AlN/a面Sapphire上への減圧HVPE法によるAlN成長2011

    • Author(s)
      高木雄太, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Distribution of three-dimensional local strain in thick AlN film grown on a trenchpatterned AlN/α-Al_2O_3 template2011

    • Author(s)
      原田進司, 渡邉翔太, 吉川純, 中村芳明, 酒井朗, 三宅秀人, 平松和政, 今井康彦, 木村滋, 坂田修
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si-doped AlGaN超格子の作製と発光評価2011

    • Author(s)
      三宅秀人, 島原佑樹, 落合俊介, 平松和政, 福世文嗣, 岡田知幸, 高岡秀嗣, 吉田治正, 桑野範之
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlGaN系量子井戸構造の内部量子効率に対するSi添加効果2011

    • Author(s)
      赤瀬大貴, 室谷英彰, 穴井恒二, 倉井聡, 山田陽一, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Al_xGa_<1-x>N膜におけるLOフォノン-プラズモン結合モードの観測2011

    • Author(s)
      木村篤人, 金廷坤, 亀井靖人, 蓮池紀幸, 木曽田賢治, 播磨弘, 島原佑樹, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Al_xGa_<1-x>N混晶の組成決定2011

    • Author(s)
      金廷坤, 木村篤人, 亀井靖人, 蓮池紀幸, 木曽田賢治, 播磨弘, 島原佑樹, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高Al組成AlGaN混晶薄膜の励起子分子結合エネルギー2011

    • Author(s)
      橘高亮, 武藤弘貴, 室谷英彰, 倉井聡, 山田陽一, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] MOVPE法による選択成長を用いたGaN基板の反り制御2011

    • Author(s)
      大内澄人, 直井弘之, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlN/サファイア上の低?中Al組成AlGaN層の成長過程と転位の挙動2011

    • Author(s)
      桑野範之, 藤田智彰, 桑原崇彰, 三宅秀人, 平松和政
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] X線マイクロ回折を用いたGaN自立基板の格子面傾斜ゆらぎの解析2011

    • Author(s)
      渡邉翔大, 原田進司, Thanh Khan Dinh, 吉川純, 中村芳明, 三宅秀人, 平松和政, 今井康彦, 木村滋, 坂田修身, 酒井朗
    • Organizer
      第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(予稿集DVD)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Deep-Ultraviolet Emission Si-doped AlGaN Excited by Electron Beam2011

    • Author(s)
      H.Miyake, Y.Shimahara, S.Ochiai, K.Hiramatsu, F.Fukuyo, T.Okada, H.Takaoka, H.Yoshida
    • Organizer
      3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2011)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2011-03-07
    • Related Report
      2010 Final Research Report
  • [Presentation] Deep-Ultraviolet Emission Si-doped AlGaN Excited by Electron Beam2011

    • Author(s)
      H.Miyake, Y Shimahara, S.Ochiai, K.Hiramatsu, F.Fukuyo, T.Okada, H.Takaoka, H.Yoshida
    • Organizer
      3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2011)
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2011-03-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Raman scattering spectroscopy for epitaxial AlN films2011

    • Author(s)
      S.Yang, R.Miyagawa, H.Miyake, K.Hiramatsu, H.Harima
    • Organizer
      SPIE Photonic West 2011
    • Place of Presentation
      San Francisco, CA, USA
    • Year and Date
      2011-01-26
    • Related Report
      2010 Final Research Report
  • [Presentation] Raman scattering spectroscopy for epitaxial AlN films2011

    • Author(s)
      S.Yang, R.Miyagawa, H.Miyake, K.Hiramatsu, H.Harima
    • Organizer
      SPIE Photonic West
    • Place of Presentation
      アメリカ サンフランシスコ
    • Year and Date
      2011-01-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlN homo-epitaxial growth on sublimation-AlN substrate by low-pressure HVPE2011

    • Author(s)
      T.Nomura, K.Okumura, H.Miyake, K.Hiramatsu, O.Eryuu, Y.Yamada
    • Organizer
      SPIE Photonic West
    • Place of Presentation
      アメリカ サンフランシスコ
    • Year and Date
      2011-01-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] r面サファイア上a面GaN成長における反りのその場観察2010

    • Author(s)
      馬ベイ, 三宅秀人, 平松和政, 播磨弘
    • Organizer
      応用物理学会結晶工学分科会 年末講演会
    • Place of Presentation
      学習院創立百周年記念会館
    • Year and Date
      2010-12-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] サファイア基板上AlN成長における界面層評価2010

    • Author(s)
      宮川鈴衣奈, 楊士波, 三宅秀人, 平松和政
    • Organizer
      応用物理学会結晶工学分科会 年末講演会
    • Place of Presentation
      学習院創立百周年記念会館
    • Year and Date
      2010-12-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] 選択成長を用いて形成したボイドによるGaN膜の反り制御2010

    • Author(s)
      大内澄人, 三宅秀人, 平松和政
    • Organizer
      応用物理学会結晶工学分科会 年末講演会
    • Place of Presentation
      学習院創立百周年記念会館
    • Year and Date
      2010-12-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] MOVPE growth of Si-doped AlGaN and its application for ultra-violet light source2010

    • Author(s)
      H.Miyake, Y.Shimahara, K.Hiramatsu
    • Organizer
      10th Akasaki Research Center Symposium
    • Place of Presentation
      ルブラ王山(名古屋市)(招待講演)
    • Year and Date
      2010-11-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 減圧HVPE法による周期溝加工AlN/サファイア上へのELO-AlN2010

    • Author(s)
      藤田浩平, 三宅秀人, 平松和政, 乗松潤, 平山秀樹
    • Organizer
      電子情報通信学会研究会 電子デバイス、電子部品・材料、レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      大阪大学
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] 電子線励起法による深紫外光源用Si-doped AlGaNの作製と特性評価2010

    • Author(s)
      島原佑樹, 三宅秀人, 平松和政, 福世文嗣, 岡田知幸, 高岡秀嗣, 吉田治正
    • Organizer
      電子情報通信学会研究会 電子デバイス、電子部品・材料、レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      大阪大学
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] SiCを基板に用いた減圧HVPE法によるAlN成長2010

    • Author(s)
      奥村建太, 野村拓也, 三宅秀人, 平松和政, 江龍修
    • Organizer
      電子情報通信学会研究会 電子デバイス、電子部品・材料、レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      大阪大学
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication Deep-violet Light Source using MOVPE-grown Si-doped AlGaN2010

    • Author(s)
      H.Miyake, Y.Shimahara, K.Hiramatsu, F Fukuyo, T.Okada, H.Takaoka, H.Yoshida
    • Organizer
      Korea-Japan Workshop on Semiconductor for Energy Saving and Harvesting
    • Place of Presentation
      韓国 ソウル(招待講演)
    • Year and Date
      2010-10-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] Stress Analysis of a-plane GaN Grown on r-plane Sapphire Substrates2010

    • Author(s)
      B.Ma, J.Zhang, H.Miyake, K.Hiramatsu, H.Harima
    • Organizer
      International Workshop on Nitride Semiconductors 2010 (IWN-2010)
    • Place of Presentation
      アメリカ タンパ
    • Year and Date
      2010-09-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] Interface Control of AlN Buffer and Sapphire Substrate for AlN Growth2010

    • Author(s)
      R.Miyagawa, S.Yang, H.Miyake, K.Hiramatsu
    • Organizer
      International Workshop on Nitride Semiconductors 2010 (IWN-2010)
    • Place of Presentation
      アメリカ タンパ
    • Year and Date
      2010-09-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] Recombination Dynamics of Localized Excitons in Al_xGa_<1-x>N (0.37<x<0.81) Ternary Alloys2010

    • Author(s)
      H.Murotani, R.Kittaka, S.Kurai, Y.Yamada, H.Miyake, K.Hiramatsu
    • Organizer
      International Workshop on Nitride Semiconductors 2010 (IWN-2010)
    • Place of Presentation
      アメリカ タンパ
    • Year and Date
      2010-09-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] Optical Polarization Properties of Si-doped AlGaN Ternary Alloy Epitaxial Layers2010

    • Author(s)
      H.Murotani, R.Kittaka, S.Kurai, Y.Yamada, H.Miyake, K.Hiramatsu
    • Organizer
      International Workshop on Nitride Semiconductors 2010 (IWN-2010)
    • Place of Presentation
      アメリカ タンパ
    • Year and Date
      2010-09-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] サファイア上へのAlN成長における界面層の評価2010

    • Author(s)
      宮川鈴衣奈, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高Al組成を有するAl_xGa_<1-x>Nの深い電子準位の評価2010

    • Author(s)
      奥崎慎也, 菅原克也, 武富浩幸, 三宅秀人, 平松和政, 橋詰保
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 陽電子消滅によるAlGaN中の欠陥評価2010

    • Author(s)
      上殿明良, 三宅秀人, 平松和政, 石橋章司
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(招待講演)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 電子線励起による深紫外光源の開発2010

    • Author(s)
      福世文嗣, 岡田知幸, 高岡秀嗣, 吉田治正, 島原佑樹, 武富浩幸, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(招待講演)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlN/サファイア上AlGaN層の成長過程と貫通転位の挙動2010

    • Author(s)
      桑野範之, 藤田智彰, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(招待講演)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlGaN混晶薄膜の励起スペクトル2010

    • Author(s)
      橘高亮, 室谷英彰, 武藤弘貴, 倉井聡, 山田陽一, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlGaN混晶薄膜における偏光特性のSi濃度依存性2010

    • Author(s)
      室谷英彰, 橘高亮, 武藤弘貴, 倉井聡, 山田陽一, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] AlGaN混晶の広領域での複素屈折率2010

    • Author(s)
      岩井浩紀, 小田哲, 福井一俊, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 選択成長により形成されたボイドを利用したGaN膜の反り制御2010

    • Author(s)
      大内澄人, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] r面サファイア上a面GaNの反り異方性2010

    • Author(s)
      馬ベイ, 張紀才, 三宅秀人, 平松和政, 播磨弘
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Al_xGa_<1-x>N膜組成とバンドギャップ変化の分光評価2010

    • Author(s)
      木村篤人, 金廷坤, 亀井靖人, 蓮池紀幸, 木曽田賢治, 播磨弘, 島原佑樹, 三宅秀人, 平松和政
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 電子線励起による深紫外光源用Si-doped AlGaNの作製2010

    • Author(s)
      島原佑樹, 三宅秀人, 平松和政, 福世文嗣, 岡田知幸, 高岡秀嗣, 吉田治正
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルAlN膜のラマン散乱分光による評価2010

    • Author(s)
      楊士波, 宮川鈴衣奈, 張紀才, 三宅秀人, 平松和政, 播磨弘
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 昇華法AlN基板上への減圧HVPE法によるAlNホモエピタキシャル成長2010

    • Author(s)
      野村拓也, 奥村建太, 三宅秀人, 平松和政, 江龍修, 山田陽一
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 減圧HVPE法による周期溝加工AlN/サファイア上へのAlN横方向成長2010

    • Author(s)
      藤田浩平, 三宅秀人, 平松和政, 乗松潤, 平山秀樹
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Structural study of selective-area grown a-plane GaN2010

    • Author(s)
      B.Ma, H.Miyake, K.Hiramatsu
    • Organizer
      第29回電子材料シンポジウム(EMS29)
    • Place of Presentation
      ラフォーレ修善寺
    • Year and Date
      2010-07-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Study on AlN buffer layer for AlN growth on sapphire substrate by MOVPE2010

    • Author(s)
      R.Miyagawa, H.Miyake, K.Hiramatsu
    • Organizer
      第29回電子材料シンポジウム(EMS29)
    • Place of Presentation
      ラフォーレ修善寺
    • Year and Date
      2010-07-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] HVPE Growth of Thick AlN on Trench-Patterned Sapphire Substrate2010

    • Author(s)
      H.Miyake, K.Okuura, K.Fujita, K.Hiramatsu
    • Organizer
      The 3rd International Symposium on Growth of III-Nitrides (ISGN-3)
    • Place of Presentation
      Montpellier,France
    • Year and Date
      2010-07-06
    • Related Report
      2010 Final Research Report
  • [Presentation] HVPE Growth of Thick AlN on Trench-Patterned Sapphire Substrate2010

    • Author(s)
      H.Miyake, K.Okuura, K.Fujita, K.Hiramatsu
    • Organizer
      The 3rd International Symposium on Growth of III-Nitrides (ISGN-3)
    • Place of Presentation
      フランス モンペリエ
    • Year and Date
      2010-07-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Evidence for Movement of Threading Dislocations in GaN Thin Layers during the VPE Growth2010

    • Author(s)
      N.Kuwano, T.Fujita, T.Ezaki, R.Miyagawa, S.Ohuchi, H.Miyake, K.Hiramatsu
    • Organizer
      The 3rd International Symposium on Growth of III-Nitrides (ISGN-3)
    • Place of Presentation
      フランス モンペリエ
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] HVPE growth of AlN on trench-patterned 6H-SiC substrates2010

    • Author(s)
      K.Okumura, H.Miyake, K.Hiramatsu, O.Eryu
    • Organizer
      The 37th International Conference on Compound Semiconductors (ISCS2010)
    • Place of Presentation
      高松シンボルタワー
    • Year and Date
      2010-06-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] HVPE growth of c-plane AlN on a-plane sapphire using high-temperature buffer layer2010

    • Author(s)
      Y.Takagi, R.Miyagawa, H.Miyake, K.Hiramatsu
    • Organizer
      The 37th International Conference on Compound Semiconductors (ISCS2010)
    • Place of Presentation
      高松シンボルタワー
    • Year and Date
      2010-06-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] Deep-ultraviolet luminescence from Si-doped AlGaN grown by low-pressure MOVPE2010

    • Author(s)
      Y.Shimahara, H.Taketomi, H.Miyake, K.Hiramatsu, F.Fukuyo, T.Okada, H.Takaoka, H.Yoshida
    • Organizer
      The 8th International Symposium on Semiconduct or Light Emitting Devices (ISSLED2010)
    • Place of Presentation
      中国 北京
    • Year and Date
      2010-05-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] HVPE growth of crack-free thick AlN film on trench-patterned AlN template2010

    • Author(s)
      K.Fujita, K.Okuura, H.Miyake, K.Hiramatsu, J.Norimatsu, H.Hirayama
    • Organizer
      The 8th International Symposium on Semiconductor Light Emitting Devices (ISSLED2010)
    • Place of Presentation
      中国 北京
    • Year and Date
      2010-05-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of Deep Ultra-violet Light Source using AlGaN on AlN/sapphire2010

    • Author(s)
      H.Miyake, H.Taketomi, Y.Shimahara, K.Hiramatsu, F.Fukuyo, T.Okada, H.Takaoka, H.Yoshida
    • Organizer
      The 8th International Symposium on Semiconductor Light Emitting Devices (ISSLED2010)
    • Place of Presentation
      Beijing, China(招待講演)
    • Year and Date
      2010-05-18
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication of Deep Ultra-violer Light Source using AlGaN on AlN/sapphire2010

    • Author(s)
      H.Miyake, H.Taketomi, Y.Shimahara, K.Hiramatsu, F.Fukuyo, T.Okada, H.Takaoka, H.Yoshida
    • Organizer
      The 8th International Symposium on Semiconductor Light Emitting Devices (ISSLED2010)
    • Place of Presentation
      中国 北京(招待講演)
    • Year and Date
      2010-05-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] サファイア基板上へのAlNのMOVPE成長における界面制御2010

    • Author(s)
      宮川鈴衣奈, 三宅秀人, 平松和政
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] 溝加工6H-SiC基板上への減圧HVPE法によるAlN成長2010

    • Author(s)
      奥村建太, 三宅秀人, 平松和政, 江龍修
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si-doped AlGaNのMOVPE成長と光学特性評価2010

    • Author(s)
      島原佑樹, 武富浩幸, 三宅秀人, 平松和政, 他4名
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of 247 nm Light-Source Using AlGaN on AlN/Sapphire2010

    • Author(s)
      Y.Shimahara, H.Taketomi, H.Miyake, K.Hiramatsu, et al.
    • Organizer
      IS Plasma 2010
    • Place of Presentation
      名城大学
    • Year and Date
      2010-03-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Low Pressure HVPE Growth of AlN on 6H-SiC2010

    • Author(s)
      K.Okumura, H.Miyake, K.Hiramatsu, O.Eryuu
    • Organizer
      IS Plasma 2010
    • Place of Presentation
      名城大学
    • Year and Date
      2010-03-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] AIN Growth on Trench-Patterned AlN/Sapphire by Low-Pressure HVPE2010

    • Author(s)
      K.Fujita, K.Okuura, H.Miyake, K.Hiramatsu, J.Norimatsu, H.Hirayama
    • Organizer
      IS Plasma 2010
    • Place of Presentation
      名城大学
    • Year and Date
      2010-03-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth of High-Quality AlN on a-Plane Sapphire by HVPE2010

    • Author(s)
      Y.Takagi, J.Wu, H.Miyake, K.Hiramatsu
    • Organizer
      IS Plasma 2010
    • Place of Presentation
      名城大学
    • Year and Date
      2010-03-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of ultraviolet-C light source using MOVPE grown AlGaN layer on AlN/sapphire2010

    • Author(s)
      H.Miyake
    • Organizer
      SPIE Photonics West 2010
    • Place of Presentation
      San Francisco, CA, USA(招待講演)
    • Year and Date
      2010-01-28
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication of ultraviolet-C light source using MOVPE grown AIGaN layer on AlN/sapphire2010

    • Author(s)
      Hideto Miyake
    • Organizer
      SPIE Photonics West 2010
    • Place of Presentation
      サンフランシスコ(米国)
    • Year and Date
      2010-01-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth of High Quality c-plane AlN on a-plane Sapphire2009

    • Author(s)
      R.Miyagawa, J.Wu, H.Miyake, K.Hiramatsu
    • Organizer
      MRS Fall Meeting
    • Place of Presentation
      ボストン(米国)
    • Year and Date
      2009-12-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Control of Facet Structures in Selective Area Growth (SAG) of a-plane GaN by MOVPE2009

    • Author(s)
      B.Ma, R.Miyagawa, H.Miyake, K.Hiramatsu
    • Organizer
      MRS Fall Meeting
    • Place of Presentation
      ボストン(米国)
    • Year and Date
      2009-12-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] 周期溝加工AlN/サファイア上への減圧HVPE法によるAIN成長2009

    • Author(s)
      藤田浩平、奥浦一一輝、三宅秀人、平松和政、乗松潤、平山秀樹
    • Organizer
      電子情報通信学会電子デバイス、電子部品・材料、レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-11-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] AlN/sapphhle上のAlGaNのMOVPE成長と発光特性2009

    • Author(s)
      島原佑樹、武富浩幸、三宅秀人、平松和政, 他4名
    • Organizer
      電子情報通信学会電子デバイス、電子部品・材料、レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] MOVPE法を用いたa面GaNの選択成長2009

    • Author(s)
      馬ベイ、胡衛国、宮川鈴衣奈、三宅秀人、平松和政
    • Organizer
      第39回結晶成長国内会議
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] 減圧HVPE法による溝加工基板上へのAlN成長2009

    • Author(s)
      奥浦一輝、藤田浩平、三宅秀人、平松和政
    • Organizer
      第39回結晶成長国内会議
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-13
    • Related Report
      2009 Annual Research Report
  • [Presentation] 減圧HVPE法による6H-SiC上へのAlN成長2009

    • Author(s)
      奥村建太、三宅秀人、平松和政、江龍修
    • Organizer
      第39回結晶成長国内会議
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-13
    • Related Report
      2009 Annual Research Report
  • [Presentation] MOVPE法による高温AlN成長2009

    • Author(s)
      宮川鈴衣奈、三宅秀人、平松和政
    • Organizer
      第39回結晶成長国内会議
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-13
    • Related Report
      2009 Annual Research Report
  • [Presentation] A-Plane AlN and AlGaN Growth on R-Plane Sapphire by MOVPE2009

    • Author(s)
      R.Miyagawa, H.Miyake, K.Hiramatsu
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      済州島(韓国)
    • Year and Date
      2009-10-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] MOVPE Growth of AlGaN with AlN Mole-Fractiom Control Layer2009

    • Author(s)
      H.Miyake, H.Taketomi, Y.Shimahara, K.Hiramatsu, et al.
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-21
    • Related Report
      2010 Final Research Report
  • [Presentation] MOVPE Growth of AlGaN with AlN Mole-Fractiom Control Layer2009

    • Author(s)
      H.Miyake, H.Taketomi, Y.Shimahara, K.Hiramatsu, et al.
    • Organizer
      The 8th International Conference on Nitride Semi conductors
    • Place of Presentation
      済州島(韓国)
    • Year and Date
      2009-10-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] The In-Plane Anisotropic and Polarized Raman-Active Modes Studies of Nonpolar AlN Grown on 6H-SiC by Low-Pressure HVPE2009

    • Author(s)
      J.Wu, K.Okumura, H.Miyake, K.Hiramatsu
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-19
    • Related Report
      2010 Final Research Report
  • [Presentation] The In-Plane Anisotropic and Polarized Raman-Active Modes Studies of Nonpolar AIN Grown on 6H-SiC by Low-Pressure HVPE2009

    • Author(s)
      J.Wu, K.Okumura, H.Miyake, K.Hiramatsu
    • Organizer
      The 8th International Conference on Nitride Semi conductors
    • Place of Presentation
      済州島(韓国)
    • Year and Date
      2009-10-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高Al組成AlGaNのAlN/sapphire上へのMOVPE成長と発光特性2009

    • Author(s)
      島原佑樹、武富浩幸、三宅秀人、平松和政, 他4名
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 電子線励起によるAlGaNを用いた深紫外光源2009

    • Author(s)
      武富浩幸、島原佑樹、三宅秀人、平松和政, 他4名
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 周期溝加工基板を用いた減圧HVPE法によるAlN厚膜成長2009

    • Author(s)
      平松和政、三宅秀人、奥浦一輝、桑野範之
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] 周期溝加工AlN/サファイア上への減圧HVPE法によるAlN成長2009

    • Author(s)
      藤田浩平、奥浦一輝、三宅秀人、平松和政、乗松潤、平山秀樹
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] 加工サファイア基板上へのMOVPE法によるGaN成長における反射・反りのその場観察2009

    • Author(s)
      西村将太、生川光久、三宅秀人、平松和政、深野敦之、谷口豊
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] In situ monitoring on MOVPE growth of nitride semiconductors2009

    • Author(s)
      M.Narukawa, S.Nishimura, Y.Ogawahara, H.Miyake, K.Hiramatsu
    • Organizer
      第28回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ琵琶湖(滋賀県守山市)
    • Year and Date
      2009-07-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Mobility enhancement in MOVPE-grown AlGaN/AlN/GaN HEMT structures2009

    • Author(s)
      W.Hu, B.Ma, D.Li, R.Miyagawa, M.Narukawa, H.Miyake K.Hiramatsu
    • Organizer
      Asia-Pacific Workshop on wide gap Semiconductors (APWS 2009)
    • Place of Presentation
      張家界(中国)
    • Year and Date
      2009-05-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] Influence of off-cut angle of sapphire on the crystal quality of nonpolara-plane AIN by LP-HVPE2009

    • Author(s)
      J.Wu, Y.Katagiri, K.Okuura, H.Miyake, K.Hiramatsu
    • Organizer
      Asia-Pacific Workshop on wide gap Semiconductors (APWS 2009)
    • Place of Presentation
      張家界(中国)
    • Year and Date
      2009-05-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] Effects of r-plane sapphire nitridation on a-plane GaN grown by MOVPE2009

    • Author(s)
      B.Ma, H.Miyake, K.Hiramatsu
    • Organizer
      Asia-Pacific Workshop on wide gap Semiconductors (APWS 2009)
    • Place of Presentation
      張家界(中国)
    • Year and Date
      2009-05-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] AlN/sapphire上のAlGaNのMOVPE成長と電子線励起による深紫外発光2009

    • Author(s)
      武富浩幸、三宅秀人、平松和政, 他4名
    • Organizer
      電子情報通信学会電子デバイス電子部品・材料シリコン材料・デバイス研究会
    • Place of Presentation
      豊橋技術科学大学(豊橋市)
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] MOVPE法によるr面サファイア上へのa面GaN成長2009

    • Author(s)
      馬ベイ、宮川鈴衣奈、胡衛国、三宅秀人、平松和政
    • Organizer
      電子情報通信学会電子デバイス電子部品・材料シリコン材料・デバイス研究会
    • Place of Presentation
      豊橋技術科学大学
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] 窒化物半導体のMOVPE成長におけるその場観察2009

    • Author(s)
      生川満久、西村将太、小川原悠哉、三宅秀人、平松和政
    • Organizer
      第1回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] r面サファイア上へのMOVPE法によるa面AlN、 AlGaN成長2009

    • Author(s)
      宮川鈴衣奈、三宅秀人、平松和政
    • Organizer
      第1回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] HVPE growth of AlN on trench patterned sapphire2009

    • Author(s)
      H.Miyake, Y.Katagiri, K.Okuura, K.Hiramatsu
    • Organizer
      SPIE Photonic West
    • Place of Presentation
      San Jose, CA, USA(招待講演)
    • Year and Date
      2009-01-26
    • Related Report
      2010 Final Research Report 2008 Annual Research Report
  • [Presentation] HVPE growth of AlN on trench patterned sapphire(招待講演)2009

    • Author(s)
      H. Miyake, Y. Katagiri, K. Okuura and K. Hiramatsu
    • Organizer
      SPIE Photonic West
    • Year and Date
      2009-01-26
    • Related Report
      2008 Self-evaluation Report
  • [Presentation] HVPE Growth of Crack-free Thick AlN Using Strain-Control Technique2008

    • Author(s)
      H.Miyake, Y.Katagiri, S.Kishino, K.Okuura, K.Hiramatsu
    • Organizer
      International Workshop on Nitride Semiconductors 2008
    • Place of Presentation
      Montreux,Switzerland
    • Year and Date
      2008-10-08
    • Related Report
      2010 Final Research Report
  • [Presentation] HVPE Growth of Crack-free Thick AlN Using Strain-Control Technique2008

    • Author(s)
      H. Miyake, Y. Katagiri, S. Kishino, K. Okuura, and K. Hiramatsu
    • Organizer
      International Workshop on Nitride Semiconductors 2008
    • Year and Date
      2008-10-08
    • Related Report
      2008 Self-evaluation Report
  • [Presentation] HVPE Growth of Crack-free Thick AlN Using Strain-Control Technique2008

    • Author(s)
      H.Miyake, Y.Katagiri, S.Kishino, K.Okuura, and K. Hiramatsu
    • Organizer
      International Workshop on Nitride Semiconductors 2008
    • Place of Presentation
      Montreux, Swiss
    • Year and Date
      2008-10-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth of crack-free AlGaN on selective area growth GaN2008

    • Author(s)
      H.Miyake, N.Masuda, Y.Ogawahara, M.Narukawa, K.Hiramatsu, et al.
    • Organizer
      14th International Conference on Metalorganic vapor phase epitaxy
    • Place of Presentation
      Metz, France
    • Year and Date
      2008-06-04
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth of crack-free AlGaN on selective area growth GaN2008

    • Author(s)
      H. Miyake, N. Masuda, Y. Ogawahara, M. Narukawa, K. Hiramatsu et al.
    • Organizer
      14th International Conference on Metalorganic vapor phase epitaxy
    • Year and Date
      2008-06-04
    • Related Report
      2008 Self-evaluation Report
  • [Presentation] Growth of crack-free AlGaN on selective area growth GaN2008

    • Author(s)
      H.Miyake, N. Masuda, Y. Ogawahara, M.Narukawa, K.Hiramatsu, et.al.
    • Organizer
      14th International Conference on Metal organic vapor phase epitaxy
    • Place of Presentation
      Metz, France
    • Year and Date
      2008-06-04
    • Related Report
      2008 Annual Research Report
  • [Presentation] ファセット制御ELO法による窒化物半導体のエピタキシャル成長2008

    • Author(s)
      三宅秀人, 平松和政
    • Organizer
      日本学術振興会マイクロビームアナリシス第141委員会
    • Place of Presentation
      三重大学(招待講演)
    • Year and Date
      2008-05-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] Selective area growth of III-nitride and their application for emitting Devices2007

    • Author(s)
      K.Hiramatsu, H.Miyake, D.Li
    • Organizer
      1st International Conference on White LEDs and Solid State Lighting
    • Place of Presentation
      Tokyo, Japan(招待講演)
    • Year and Date
      2007-11-28
    • Related Report
      2010 Final Research Report
  • [Presentation] Selective area growth of III-nitride and their application for emitting Devices(招待講演)2007

    • Author(s)
      K. Hiramatsu, H. Miyake and D. Li
    • Organizer
      1st International Conference on White LEDs and Solid State Lighting
    • Year and Date
      2007-11-28
    • Related Report
      2008 Self-evaluation Report 2007 Annual Research Report
  • [Presentation] HVPE法によるGaN・AIN成長の現状と課題2007

    • Author(s)
      平松和政, 劉玉懐, 三宅秀人
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学(招待講演)
    • Year and Date
      2007-09-06
    • Related Report
      2010 Final Research Report
  • [Presentation] HVPE法によるGaN・AIN成長の現状と課題(招待講演)2007

    • Author(s)
      平松和政, 劉 玉懐, 三宅秀人
    • Organizer
      第68回応用物理学会学術講演会
    • Year and Date
      2007-09-06
    • Related Report
      2008 Self-evaluation Report 2007 Annual Research Report
  • [Book] 新インターユニバーシティ 半導体工学2009

    • Author(s)
      平松和政、元垣内敦司
    • Publisher
      (株)オーム社
    • Related Report
      2010 Final Research Report
  • [Book] 窒化物基板および講師整合基板の成長とデバイス特性2009

    • Author(s)
      三宅秀人、宮川鈴衣奈
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2010 Final Research Report
  • [Book] 新インターユニバーシティ 半導体工学2009

    • Author(s)
      平松和政、元垣内敦司, 他4名
    • Publisher
      (株)オーム社
    • Related Report
      2009 Annual Research Report
  • [Book] 窒化物基板および講師整合基板の成長とデバイス特性2009

    • Author(s)
      三宅秀人、宮川鈴衣奈, 他35名
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2009 Annual Research Report
  • [Remarks] ホームページ等

    • Related Report
      2010 Final Research Report
  • [Remarks] 研究室HP

    • URL

      http://www.opt.elec.mie-u.ac.jp

    • Related Report
      2010 Final Research Report
  • [Remarks] 三重大学極限ナノエレクトロニクスセンターHP

    • URL

      http://www.mie-u.ac.jp/research/intro/ct0003-00.html

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.opt.elec.mie-u.ac.jp

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.opt.elec.mie-u.ac.jp

    • Related Report
      2009 Annual Research Report
  • [Remarks] 研究室HP

    • URL

      http://www.opt.elec.mie-u.ac.jp

    • Related Report
      2008 Self-evaluation Report
  • [Remarks] 三重大学極限ナノエレクトロニクスセンターHP

    • URL

      http://www.mie-u.ac.jp/research/intro/ct0003-00.html

    • Related Report
      2008 Self-evaluation Report
  • [Remarks] (研究室HP)

    • URL

      http://www.opt.elec.mie-u.ac.jp

    • Related Report
      2008 Annual Research Report
  • [Remarks] (三重大学極限ナノエレクトロニクスセンターHP)

    • URL

      http://www.mie-u.ac.jp/research/intro/ct0003-00.html

    • Related Report
      2008 Annual Research Report

URL: 

Published: 2006-04-01   Modified: 2018-03-28  

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