| Co-Investigator(Kenkyū-buntansha) |
KOGA Kazunori 九州大学, 大学院システム情報科学研究院, 准教授 (90315127)
UCHIDA Giichiro 大阪大学, 接合科学研究所, 准教授 (90422435)
KAMATAKI Kunihiro 九州大学, 基幹教育院, 助教 (60582658)
SEO Hyunwoong 九州大学, 大学院システム情報科学研究院, 助教 (00618499)
ITAGAKI Naho 九州大学, 大学院システム情報科学研究院, 准教授 (60579100)
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| Budget Amount *help |
¥127,660,000 (Direct Cost: ¥98,200,000、Indirect Cost: ¥29,460,000)
Fiscal Year 2013: ¥28,470,000 (Direct Cost: ¥21,900,000、Indirect Cost: ¥6,570,000)
Fiscal Year 2012: ¥28,860,000 (Direct Cost: ¥22,200,000、Indirect Cost: ¥6,660,000)
Fiscal Year 2011: ¥27,820,000 (Direct Cost: ¥21,400,000、Indirect Cost: ¥6,420,000)
Fiscal Year 2010: ¥27,430,000 (Direct Cost: ¥21,100,000、Indirect Cost: ¥6,330,000)
Fiscal Year 2009: ¥15,080,000 (Direct Cost: ¥11,600,000、Indirect Cost: ¥3,480,000)
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| Research Abstract |
To reveal fluctuation of interaction between plasmas and nanointerface, we have studied effects of radical density fluctuation on growth of nano-particles in amplitude modulated pulse rf discharges, using a two-dimensional in-situ laser-light scattering method.
We have found that growth of nanoparticles are suppressed by the amplitude modulation. The results of the spectral analysis suggest that growth of nanoparticles is nonlinearly coupled with radicals. Based on the results, we have discussed a growth model of nanoparticles. Using the model, we have found that a diagram of the particle growth modes having three modes and that the model describes suppression of size dispersion of nanoparticles. We have realized the particle trapping in plasmas using an IR laser. Using the trapping, we have succeeded an in-situ measurement of the interaction between a trapped particle and radicals.
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