|Budget Amount *help
¥127,660,000 (Direct Cost : ¥98,200,000、Indirect Cost : ¥29,460,000)
Fiscal Year 2013 : ¥28,470,000 (Direct Cost : ¥21,900,000、Indirect Cost : ¥6,570,000)
Fiscal Year 2012 : ¥28,860,000 (Direct Cost : ¥22,200,000、Indirect Cost : ¥6,660,000)
Fiscal Year 2011 : ¥27,820,000 (Direct Cost : ¥21,400,000、Indirect Cost : ¥6,420,000)
Fiscal Year 2010 : ¥27,430,000 (Direct Cost : ¥21,100,000、Indirect Cost : ¥6,330,000)
Fiscal Year 2009 : ¥15,080,000 (Direct Cost : ¥11,600,000、Indirect Cost : ¥3,480,000)
To reveal fluctuation of interaction between plasmas and nanointerface, we have studied effects of radical density fluctuation on growth of nano-particles in amplitude modulated pulse rf discharges, using a two-dimensional in-situ laser-light scattering method.
We have found that growth of nanoparticles are suppressed by the amplitude modulation. The results of the spectral analysis suggest that growth of nanoparticles is nonlinearly coupled with radicals. Based on the results, we have discussed a growth model of nanoparticles. Using the model, we have found that a diagram of the particle growth modes having three modes and that the model describes suppression of size dispersion of nanoparticles. We have realized the particle trapping in plasmas using an IR laser. Using the trapping, we have succeeded an in-situ measurement of the interaction between a trapped particle and radicals.