3次元微細構造の精密計測のための光周波数スペクトル干渉顕微鏡の研究開発

• Project/Area Number: 00F00049
• Research Category: Grant-in-Aid for JSPS Fellows
• Allocation Type: Single-year Grants
• Section: 外国
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: The University of Electro-Communications
• Host Researcher: 武田 光夫
• Foreign Research Fellow: MEHTA D. S.
• Project Period (FY): 2001
• Project Status: Completed (Fiscal Year 2001)
• Budget Amount: ¥1,200,000 (Direct Cost: ¥1,200,000); Fiscal Year 2001: ¥1,200,000 (Direct Cost: ¥1,200,000)