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MOCVD/ゾルーゲル新規プロセス開発によるFeRAM用のPZT薄膜の合成とその特性
Research Project
All
Fiscal Year 2001
Fiscal Year 2000
grantAwardInfo
Project/Area Number
00F00082
Research Category
Grant-in-Aid for JSPS Fellows
Allocation Type
Single-year Grants
Section
外国
Research Field
Inorganic materials/Physical properties
Research Institution
Tokyo Institute of Technology
Principal Investigator
水谷 惟恭
Co-Investigator(Kenkyū-buntansha)
BAO D.
Project Period (FY)
2000 – 2001
Project Status
Completed (Fiscal Year 2001)
Budget Amount
*help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2001: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2000: ¥1,000,000 (Direct Cost: ¥1,000,000)