FIB加工を利用した薄膜強度評価システムの開発とCVDダイヤモンド薄膜の高強度化

• Project/Area Number: 00J05970
• Research Category: Grant-in-Aid for JSPS Fellows
• Section: 国内
• Research Field: Materials/Mechanics of materials
• Research Institution: Tohoku University
• Research Fellow: 高橋 博紀
• Project Fiscal Year: 2000 – 2001
• Project Status: Completed(Fiscal Year 2001)
• Budget Amount: ¥1,800,000 (Direct Cost : ¥1,800,000); Fiscal Year 2001 : ¥900,000 (Direct Cost : ¥900,000); Fiscal Year 2000 : ¥900,000 (Direct Cost : ¥900,000)