非接触評価に基づくシリコン表面および極薄絶縁膜/シリコン界面の制御と応用

• Project/Area Number: 00J06818
• Research Category: Grant-in-Aid for JSPS Fellows
• Section: 国内
• Research Field: Electronic materials/Electric materials
• Research Institution: Hokkaido University
• Research Fellow: 吉田 俊幸
• Project Fiscal Year: 2000 – 2000
• Project Status: Completed(Fiscal Year 2000)
• Budget Amount: ¥1,000,000 (Direct Cost : ¥1,000,000); Fiscal Year 2000 : ¥1,000,000 (Direct Cost : ¥1,000,000)