反応性非平衡RFプラズマの診断

Research Project

Project/Area Number	01632003
Research Category	Grant-in-Aid for Scientific Research on Priority Areas
Allocation Type	Single-year Grants
Research Institution	Gunma University
Principal Investigator	菅原実群馬大学, 工学部, 教授
Project Period (FY)	1989
Project Status	Completed (Fiscal Year 1989)
Budget Amount *help	¥13,000,000 (Direct Cost: ¥13,000,000) Fiscal Year 1989: ¥13,000,000 (Direct Cost: ¥13,000,000)