化学堆積法によるフッ素系アモルファスシリコン成膜過程のその場赤外観察

• Project/Area Number: 01750002
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: Tohoku University
• Principal Investigator: 和田山 智正 東北大学, 工学部, 助手
• Project Period (FY): 1989
• Project Status: Completed (Fiscal Year 1989)
• Budget Amount: ¥1,000,000 (Direct Cost: ¥1,000,000); Fiscal Year 1989: ¥1,000,000 (Direct Cost: ¥1,000,000)