エキシマレーザスパッタリングの分光学的基礎研究

• Project/Area Number: 01750276
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Meijo University
• Principal Investigator: 平松 美根男 名城大学, 理工学部, 助手
• Project Period (FY): 1989
• Project Status: Completed (Fiscal Year 1989)
• Budget Amount: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 1989: ¥900,000 (Direct Cost: ¥900,000)