反応性スパッタ法による炭窒化ホウ素セラミックス膜の作製と評価

• Project/Area Number: 01750734
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 無機工業化学
• Research Institution: Nagaoka University of Technology
• Principal Investigator: 林 範行 長岡技術科学大学, 工学部, 助手
• Project Period (FY): 1989
• Project Status: Completed (Fiscal Year 1989)
• Budget Amount: ¥800,000 (Direct Cost: ¥800,000); Fiscal Year 1989: ¥800,000 (Direct Cost: ¥800,000)