Synthesis of Hybrid Materials Surfaces by Means of Reactive Plasma Spraying
Grant-in-Aid for General Scientific Research (B)
|Allocation Type||Single-year Grants |
|Research Institution||Toyohashi Univ. of Technology |
OKANE Isao Toyohashi Univ. of Tech., Faculty of Eng., Professor, 工学部, 教授 (80169127)
FUKUMOTO Masahiro Toyohashi Univ. of Tech., Faculty of Eng., Associate Professor, 工学部, 助教授 (80173368)
UMEMOTO Minoru Toyohashi Univ. of Tech., Faculty of Eng., Associate Professor, 工作センター, 助教授 (90111921)
|Project Period (FY)
1990 – 1992
Completed (Fiscal Year 1992)
|Budget Amount *help
¥5,800,000 (Direct Cost: ¥5,800,000)
Fiscal Year 1992: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1991: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1990: ¥4,800,000 (Direct Cost: ¥4,800,000)
|Keywords||DC Plasma Spraying / RF Plasma / Reactive Plasma Spraying / Nitride Ceramics / Bias voltage / 炭化物系セラミックス|
Thermal spraying process has the advantage of producing thick coatings by its high deposition rate as compared with PVD and CVD. However, it has been shown that most of the non-oxide ceramics are easy to decompose and sublime, or difficult to melt. On account of this fact, it is difficult to apply the conventional thermal spraying process to the deposition of non-oxide ceramics films.
Therefore, we aimed reactive plasma spraying method intending to form coatings having a property that is different from that of source material, by means of the reaction between elemental metal in liquid phase and active species in plasma gas.
The purpose of this research is to investigate the possibility of reactive plasma spraying process fundamentally. TiN was selected as object material. Several factors influencing on the amount of nitride in coatings were investigated. Reaction mechanism in this process was also discussed.
The main results obtained were summarized as follows:
1) Reaction between Ti and p
lasma gas was recognized to be accelerated in the case of mechanically alloyed Ti/Al composite powder, which contained the metal element of lower melting point.
2) Degree of reaction between Ti and nitrogen increased with the increase of the mole ratio of nitrogen to Ti.
3) Almost pure TiN coatings were obtained under the spraying conditions of 13kPa chamber pressure and 10 l/min N_2 gas flow rate. However, because of these coatings included much pore, spraying conditions had to be improved to get the porefree TiN coatings.
4) Since any nitride was not recognized in sprayed powder materials collected in water, nitrogenation did not occur while particles flight in plasma but did remarkably after particles deposited on.
5) According to increase of substrate temperature, the amount of nitride in the coating increased. Therefore it is considered that substrate temperature strongly influence the formation of nitride.
6) By applying the bias between substrate and chamber, influence of bias on nitrogenation was investigated. Consequently, influence of the bias was not recognized remarkably in this research. Less
Report (4 results)
Research Products (23 results)