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Research on the thermal stress and the dislocation in GaAs grown on Si substrates

Research Project

Project/Area Number 03650018
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionThe University of Tokushima

Principal Investigator

SAKAI Shiro  Tokushima University,Electrical and Electronic Engineering Associate Professor, 工学部, 助教授 (20135411)

Project Period (FY) 1991 – 1992
Project Status Completed (Fiscal Year 1992)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1992: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1991: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsGaAs on Si / Thermal stress / Light emitting diodes / Opto-electronic IC / Degradation / dislocation / 発光ダイオ-ド / 寿命 / CaAs on Si
Research Abstract

The thermal stress which is produced in GaAs grown on Si substrates by the thermal expansion coefficient mismatch between the two materials is known to introduce dislocation into GaAs during the cooling stage after the growth and to degrade lifetime of the light emitting devices on Si.We have proposed the new UCGAS(undercut GaAs on Si)structure to reduce the stress and the stress-induced dislocation.We have found that 1.complete stress relaxation is obtained only in the annealed UCGAS since the as-grown GaAs on Si is plastically deformed,2.the reduction in both the stress and the dislocation is obtained by growing the layer on the UCGAS.
The UCGAS LED(light emitting diodes)and LD(laser diodes)were successfully fabricated,and the LED lifetime is demonstrated to be more than 3000 hours which is the longest lifetime among the GaAs LED's that are ever fabricated on the Si substrates.On the contrarily,the conventional mesa-type LED which contains high stress degrades in 30 minutes. The degradation mechanism is investigated.It was shown that the degradation is caused by the increased density of the dislocation during operation.The thermal stress relaxation is quite essential to suppress the degradation.
The above findings were published in the papers listed in the reverse side of this abstract.

Report

(3 results)
  • 1992 Annual Research Report   Final Research Report Summary
  • 1991 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] S.Sakai: "Thermal stress and defect reduction in undercut GaAs on Si substrate" Electron.Lett.27. 1371-1372 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Zinc diffusion in AlGaAs grown on Si substrate" Jpn.J.Appl.Phys.30. 1942-1943 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Selective liquid-phase electroepitaxy of GaAs on GaAs-coated Si substrates" J.Appl.Phys.70. 4899-4902 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Thermal stress in partially separated GaAs layers grown epitaxially on Si substrates" Proc.of the Mater.Res.Soc.Symp.221. 429-434 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Thermal annealing effects on the defect and stress reduction in undercut GaAs on Si" Inst.Phys.Conf.Ser.120. 113-118 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] T.Yuasa: "AlGaAs/GaAs double-heterostructure optical waveguide on Si substrates" Proc.of the Mater.Res.Soc.Symp.228. 225-230 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Selective growth of GaAs on GaAs-coated Si substrate by liquid phase electro-epitaxy" Proc.of the Mater.Res.Soc.Symp.237. 565-570 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Stable operation of AlGaAs/GaAs light-emitting diodes fabricated on Si substrate" Jpn.J.Appl.Phys.31. L78-L81 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Photoluminescence-dark-spot-free AlGaAs grown on Si substrate" Appl.Phys,Lett.60. 1354-1356 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Dislocation reduction in the annealed undercut GaAs on Si" Appl.Phys.Lett.60. 1480-1482 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Low defect density low stress GaAs grown on undercut GaAs on Si" Extended abstract of the 1992 Int.Conf.on Solid State Devices and Materials. 650-652 (1992)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Thermal stress and defect reduction in undercut GaAs on Si substrate" Electron.Lett. Vol.27,No.15. 1371-1372 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Zinc diffusion in AlGaAs grown on Si substrate" Jpn.J.Appl.Phys. Vol.30,No.9A. 1942-1943 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Selective liquid-phase electroepitaxy of GaAs on GaAs-coated Si substrates" J.Appl.Phys. Vol.70,No.9. 4899-4902 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Thermal stress in partially separated GaAs layers grown epitaxially on Si substrates" Proc.of the Mater.Res.Soc.Symp. Vol.221. 429-434 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Thermal annealing effects on the defect and stress reduction in undercut GaAs on Si" Inst.Phys.Conf.Ser. No.120. 113-118 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] T.Yuasa: "AlGaAs/GaAs double-heterostructure optical waveguide on Si substrates" Proc.of the Mater.Res.Soc.Symp. Vol.228. 225-230 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Selective growth of GaAs on GaAs-coated Si substrate by liquid phase electro-epitaxy" Proc.of the Mater.Res.Soc.Symp. Vol.237. 565-570 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Stable operation of AlGaAs/GaAs light-emitting diodes fabricated on Si substrate" Jpn.J.Appl.Phys. Vol.31 No.2A. L78-L81 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Photoluminescence-dark-spot-free AlGaAs grown on Si substrate" Appl.Phys,Lett. Vol.60,No.11. 1354-1356 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai: "Dislocation reduction in the annealed undercut GaAs on Si" Appl.Phys.Lett. Vol.60 No.12. 1480-1482 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] N.Wada: "Low defect density low stress GaAs grown on undercut GaAs on Si" Extended abstract of the 1992 Int.Conf.on Solid State Devices and Materials. 650-652 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1992 Final Research Report Summary
  • [Publications] S.Sakai,K.Inubushi,T.Hyakudai,Y.Shintani: "Growth of InAsP on Inp by liquid phase electroepitaxy" Jpn.J.Appl.Phys.Vol.30,No.3B. L425-427 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] N.Wada,K.Higashiyama,S.Sakai,S.Shintani,Y.Ueta,T.Yuasa,S.Koshiba,M.Umeno,K.Uematsu: "A New reactor for metalorganic Chemical vapor deposition equipped with an internal flow selector" Jpn.J.Appl.Phys.Vol.30,No.3A. L396-397 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Sakai,K.Kawasaki,M.Okada,N.Wada,Y.Shintani: "Thermal stress and defectreduction in undercut GaAs on Si substrate" Electron.Lett.Vol.27,No.15. 1371-1372 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Sakai,Y.terauchi,N.Wada,Y.Shintani: "Zinc diffusion in AlGaAs grown on Si substrate" Jpn.J.Appl.Phys.Vol.30,No.9A. 1942-1943 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Sakai,Y.Ohashi,Y.Shintani: "Selective liquidーphase electroepitaxy of GaAs on GaAsーCoated Si substrates" J.Appl.Phys.Vol.70,No.9. 4899-4902 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] K.Inubushi,S.Sakai,T.Hyakudai,Y.Shintani,: "Currentーcontrolled liquid phase epitaxy of InAsP on InP subustres" Conf.Proc.3rd.Int.on Inp and Related Materials. WP47. 488-491 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] Y.Ueta,N.Wada,S.Sakai Y.Sintani: "Growth mechanism of AlGaAs on terraced subustrates by low pressure MOVPE" J.Electron.Mater. Vol.21,No.3. 355-359 (1992)

    • Related Report
      1991 Annual Research Report
  • [Publications] N.Wada,S.Sakai,Y.Ueta,K.kawasaki: "Thermal stress in partially separated GaAs layers grown epitexially on Si substrates"

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Sakai,N.wada,S.Yoshimi,C.L.Shao: "Thermal annealing effects on the defect and stress reduction in undercut GaAs on Si"

    • Related Report
      1991 Annual Research Report
  • [Publications] S.Sakai,Y.Ohashi: "Selective grown of GaAs on GaAsーcoated Si substrate by liquid phase electroepitaxy"

    • Related Report
      1991 Annual Research Report

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Published: 1991-04-01   Modified: 2016-04-21  

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