|Budget Amount *help
¥2,000,000 (Direct Cost : ¥2,000,000)
Fiscal Year 1993 : ¥800,000 (Direct Cost : ¥800,000)
Fiscal Year 1992 : ¥1,200,000 (Direct Cost : ¥1,200,000)
Three silicon compounds, dimethyldimethoxysilane (DMDMOS), decamethylcyclo-pentasiloxane (DMCPS), and 1,1,3,3-tetramethyldisiloxane (TMDSO), were plasma-poly-merized, and the solubility coefficient and the permeation coefficient of carbon dioxide and nitrogen gas were determined. The permeation properties of the deposited films were discussed. The plasma polymers formed from DMDMOS, DMCPS, and TMDSO showed pre-ferential solubility for carbon dioxide. The solubility coefficient of carbon dioxide was closely related to the concentration of Si-(O-)_4 moieties in the plasma polymers. However, these plasma polymers showed no selective permeation of carbon dioxide. The diffusion process rather than the solution process controlled the permeation of carbon dioxide across the plasma polymers. Plasma polymers formed from silicon compounds, if the polymers have less cross-linkage, are expected to be a good material for CO_2-selective membrane.