Si単結晶薄膜成長中における光電子スペクトル強度の振動に関する基礎的研究

• Project/Area Number: 04750002
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: Tohoku University
• Principal Investigator: 遠田 義晴 東北大学, 電気通信研究所, 助手
• Project Period (FY): 1992
• Project Status: Completed (Fiscal Year 1992)
• Budget Amount: ¥1,100,000 (Direct Cost: ¥1,100,000); Fiscal Year 1992: ¥1,100,000 (Direct Cost: ¥1,100,000)